Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film

A liquid phase epitaxy, mercury cadmium telluride technology, applied in the field of infrared detection, can solve the problem of liquid phase epitaxy surface thickness height difference, etc., to improve the surface morphology and thickness uniformity, thickness standard deviation improvement, good thickness uniformity. Effect

Inactive Publication Date: 2017-05-10
11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Abstract
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  • Application Information

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Problems solved by technology

However, in addition to the characteristic morphology determined by the growth mechanism, there will be macroscopic ripples caused by the thickness difference on the surface of the liqui

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  • Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film
  • Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film
  • Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film

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Embodiment Construction

[0012] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0013] The present application has found through research that the macroscopic ripples on the liquid phase epitaxy surface due to the difference in thickness and height are caused by the leakage of the graphite cavity and the uneven distribution of the temperature field. The leakage of mercury and tellurium vapor in the graphite cavity will lead to inhomogeneity in the gas phase above the mother liquor, which together with temperatu...

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Abstract

The invention discloses a graphite boat for epitaxial growth of a horizontal liquid phase of a mercury cadmium telluride thin film. The graphite boat comprises an upper cover, a bottom support, a sliding strip and a mother solution tank, wherein the bottom support comprises a groove with one bottom edge and two side edges; the sliding strip and the mother solution tank are arranged in the groove; the mother solution tank is fixed at the upper end of the groove; the upper surface of the mother solution tank is leveled with the upper surfaces of the two side edges; the sliding strip is located between the mother solution tank and the bottom edge of the bottom support, and can do movement relative to the mother solution tank along the bottom edge; the upper cover is of a solid structure and covers the side edges of the bottom support and the mother solution tank; a drainage channel is arranged in the upper cover; a starting point and a finishing point of the drainage channel are located on a contact surface of the upper cover and the mother solution tank. According to the graphite boat disclosed by the embodiment of the invention, a drainage groove is formed in the upper cover, and a temperature field, gas flow, gas-phase distribution and mercury pressure in an epitaxial growth process of the horizontal liquid phase can be improved to a certain extent, so that the problems about surface appearance and thickness uniformity of the mercury cadmium telluride thin film are solved.

Description

technical field [0001] The invention relates to the field of infrared detection, in particular to a graphite boat used for horizontal liquid phase epitaxial growth of mercury cadmium telluride thin films. Background technique [0002] Since HgCdTe material is a direct bandgap semiconductor material with adjustable bandgap width, which can cover the entire infrared band, HgCdTe material has been widely used in the preparation of different types of infrared detectors since the 1970s. At present, it has become the most widely used detector material in the field of infrared detection. After nearly 30 years of continuous development, many high-quality Hg 1-x Cd x Te epitaxial film and high-performance infrared detection device. Quasi-equilibrium state growth is the advantage of liquid phase epitaxy. The structural integrity of the grown crystal is very good. Except for the extension of substrate defects, mercury cadmium telluride liquid phase epitaxy itself can hardly introduc...

Claims

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Application Information

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IPC IPC(8): C30B19/06C30B29/48
CPCC30B19/06C30B29/48
Inventor 杨海燕胡尚正郭明珠周立庆
Owner 11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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