A curvature sensor based on a flexible substrate mems switch structure
A technology of curvature sensor and flexible substrate, which is applied in the field of curvature sensor, can solve the problems of inability to measure the precise value of geometric shape, inability to measure online, and large volume, and achieve the effect of simple measurement, excellent mechanical properties, and small volume
Active Publication Date: 2018-03-23
SOUTHEAST UNIV
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Problems solved by technology
[0002] In the current devices for measuring curvature, the radius of curvature of convex and concave surfaces of any shape is generally measured by R-shaped surface templates. Since the R-shaped surface template is a comparative measurement, it is impossible to measure the precise value of the geometric shape.
Although the three-coordinate measuring instrument can solve the above problems well, the cost is too high and the volume is too large to be measured online.
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[0014] The present invention will be further described below in conjunction with the accompanying drawings.
[0015] see figure 1 with figure 2 , the present invention provides a curvature sensor based on a flexible substrate MEMS switch structure, the curvature sensor includes a flexible substrate 1, a coplanar waveguide signal line 2 arranged on the upper surface of the flexible substrate 1, a coplanar waveguide first ground wire 3a and a common The second ground wire 3b of the planar waveguide, the first suction block 4a, the second suction block 4b, the MEMS membrane bridge 5 connecting the first coplanar waveguide ground wire 3a and the first coplanar waveguide ground wire 3b, and the first DC Drive block 6a and the second DC drive block 6b;
[0016] The coplanar waveguide signal line 2, the coplanar waveguide first ground line 3a and the coplanar waveguide second ground line 3b together form a coplanar waveguide on the flexible substrate 1, and the MEMS film bridge 5 ...
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The invention provides a curvature sensor based on a flexible substrate MEMS switch structure. The sensor is characterized in that the curvature sensor comprises a flexible substrate (1), a coplanar wave-guide signal line (2), a coplanar wave-guide first ground wire (3a), a coplanar wave-guide second ground wire (3b), a first pull-in block (4a), a second pull-in block (4b), an MEMS film bridge (5), a first direct-current driving block (6a) and a second direct-current driving block (6b), wherein the coplanar wave-guide signal line (2), the coplanar wave-guide first ground wire (3a), the coplanar wave-guide second ground wire (3b), the first pull-in block (4a) and the second pull-in block (4b) are arranged on the upper surface of the flexible substrate (1), and the MEMS film bridge (5) is connected with the coplanar wave-guide first ground wire (3a) and the coplanar wave-guide second ground wire (3b). The sensor achieves the measurement of curvature by measuring the variation of the pull-in voltage loaded by the direct-current driving blocks (6a and 6b).
Description
technical field [0001] The invention relates to a curvature sensor based on a MEMS switch structure of a flexible substrate. The curvature sensor realizes curvature measurement by changing the pull-in voltage of a MEMS switch attached to a flexible substrate on a curvature surface, and belongs to the technical field of microelectronic devices. Background technique [0002] In the current devices for measuring curvature, the radius of curvature of a convex-concave surface of any shape is generally measured by an R-shaped surface template. Since the R-shaped surface template is a comparative measurement, it is impossible to measure the precise value of the geometric shape. Although the three-coordinate measuring instrument can solve the above problems well, the cost is too high and the volume is too large to be measured online. Similar problems also exist in non-contact optical measurement methods. [0003] The curvature sensor in the present invention is based on MEMS techno...
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IPC IPC(8): B81B7/04B81B7/02H01P1/15G01B7/28
CPCB81B7/02B81B7/04G01B7/28H01P1/15
Inventor 韩磊肖申于洋
Owner SOUTHEAST UNIV