High-power semiconductor stack smile correction and line width narrowing device and method
A line width narrowing, semiconductor technology, applied in the direction of instruments, polarizing elements, optics, etc., can solve the problems of complex external cavity method, difficult heat dissipation of the transmission phase plate, low integration, etc., and achieve simple structure and cooling effect Good, the effect of reducing the difficulty of processing
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[0039] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0040] Such as Figure 4 It is a structural composition diagram of the high-power semiconductor stack smile correction and line width narrowing device of the present invention.
[0041] In this embodiment, the high-power semiconductor stack smile correction and external cavity linewidth narrowing system includes the following parts: a laser source 11 composed of a high-power semiconductor stack; a fast-axis collimation device 21 composed of a micro-cylindrical lens array; Smile correction device composed of reflective phase plate 31; aberration compensation device composed of aberration compensation reflective phase plate 41; telephoto magnification system composed of concave lens 51 and convex lens 52; wavelength selection device composed of surface grating 61.
[0042] The specific work process of this embodiment is as follows:
[0043] The...
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