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Single galvanometer total-reflection type displacement focusing 3D scanning optical system

A total reflection, optical system technology, applied in the field of single galvanometer total reflection displacement focusing 3D scanning optical system, can solve problems such as reducing beam energy utilization, improve laser reflectivity changes, optimize the number of galvanometers, The effect of improving the withstand power

Inactive Publication Date: 2017-05-31
SHANGHAI EMPOWER AUTOMATION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Moreover, ordinary galvanometer scanning systems often require more mirrors during laser processing, even two-dimensional scanning processing, which reduces the energy utilization of the beam, while the reflective optical path is relatively better.

Method used

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  • Single galvanometer total-reflection type displacement focusing 3D scanning optical system
  • Single galvanometer total-reflection type displacement focusing 3D scanning optical system
  • Single galvanometer total-reflection type displacement focusing 3D scanning optical system

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Embodiment 1

[0033] This embodiment is aimed at fiber optic output lasers. After the fiber laser is output, it is collimated by the off-axis parabolic mirror 4, wherein the position of the light output point of the fiber coincides with the focal point of the off-axis parabolic mirror 4, and the collimated beam passes through the convex off-axis parabolic mirror 1 and After the concave ellipsoid mirror 2 expands and focuses the beam, it passes through the biaxially rotating planar mirror 3 to realize 3D space scanning. At this time, the beam expander combined by the focal length of the convex off-axis parabolic mirror 1 and the concave ellipsoid mirror 2 The focusing module moves horizontally along the incident optical axis to obtain focus compensation at any 3D position.

Embodiment 2

[0035] This embodiment is aimed at freely outputting parallel light beams. The plane reflector 5 and the plane reflector 6 form a beam coaxial adjustment module. Angle deviation and position deviation, so the beam coaxial adjustment system composed of plane mirror 5 and plane mirror 6 is required to adjust the beam coaxially, and then through the convex off-axis parabolic mirror 1 and the concave ellipsoid mirror 2 to expand the beam and focus, Finally, 3D space scanning is realized through the biaxially rotating planar reflective mirror 3. At this time, the beam expander focusing module combined with the focal length of the convex off-axis parabolic mirror 1 and the concave ellipsoid mirror 2 moves horizontally along the incident optical axis to obtain Focus compensation at any 3D position.

[0036] The invention has a novel structural design, adopts a single vibrating mirror scanning scheme, optimizes the number of vibrating mirrors while realizing 3D large-scale scanning, a...

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Abstract

The invention discloses a single galvanometer total-reflection type displacement focusing 3D scanning optical system. The single galvanometer total-reflection type displacement focusing 3D scanning optical system comprises a convex-surface off-axis parabolic mirror, a concave ellipsoidal surface reflecting mirror and a plane reflection galvanometer. The single galvanometer total-reflection type displacement focusing 3D scanning optical system is novel in structural design, adopts the single galvanometer scanning scheme, and optimizes the number of galvanometers while 3D large-margin scanning is realized; during dual-axis rotation, laser reflectance is not affected by rotation around an incident optical axis, so that laser reflectance changes caused by a deflection angle of a light beam are improved; a total-reflection type metal optical lens can be directly subjected to water-cooling, and has good thermal conductive characteristics, so that power borne on the lens is greatly improved; and meanwhile, the single galvanometer total-reflection type displacement focusing 3D scanning optical system has relatively great focusing focal length, has different coating films according to types of the laser units through displacement compensation of a beam-expanding focusing module, and is especially suitable for 3D laser large-margin scanning processing application of kilowatt-level and myriawatt-level high-power laser units.

Description

technical field [0001] The invention relates to the technical field of laser vibrating mirror scanning, in particular to a single vibrating mirror full-reflection displacement focusing 3D scanning optical system. Background technique [0002] Laser processing technology covers various laser processing technologies such as laser cutting, welding, surface treatment, drilling, micro-machining, etc., and utilizes the basic characteristics of the interaction between laser and matter. Due to the advantages of non-contact between laser beam and processing materials, processing speed and quality, laser processing technology is an irreplaceable high-tech. [0003] At present, laser cutting occupies the main position of the entire laser processing industry, and with the increase of laser power, high-power laser welding, cladding, surface treatment and other processing technologies will also be expanded and improved more widely, especially high-power laser Welding can be popularized f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/082B23K26/064
CPCB23K26/0821B23K26/0643
Inventor 邵华江李思佳李思泉
Owner SHANGHAI EMPOWER AUTOMATION TECH CO LTD
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