Optical system for shape measurement

An optical path system and shape measurement technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low sampling rate of measurement data and great impact on performance, and achieve a small number of sampling points, avoid errors, and be easy to install Effect

Active Publication Date: 2019-03-22
TIANJIN UNIV
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Problems solved by technology

However, the measurement data sampling rate of the above methods is relatively low, and only the basic shape of the surface topography (low-frequency information of the surface topography) can be obtained.
The contact profiler is only suitable for collecting roughness information on a certain contour line of the surface (high frequency information of surface topography)
However, surface detail information such as texture or waviness of surface topography (intermediate frequency information of surface topography) has a great influence on performance

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  • Optical system for shape measurement
  • Optical system for shape measurement
  • Optical system for shape measurement

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Embodiment Construction

[0016] The invention combines white light interference and laser scanning methods to realize surface topography measurement in a large range and full frequency range. White light interferometry can quickly realize nanometer-precision measurement of surface topography in a small field of view. Due to the large number of sampling points for local measurement, it can achieve full-band surface information acquisition. For large-scale surface topography, multiple single-field data need to be spliced ​​and fused. However, due to the complex shape of the surface to be measured, how to reasonably plan the measurement path to achieve fast measurement and high-precision stitching is a difficult problem in realizing large-scale surface topography measurement by white light interferometry. Therefore, the introduction of the laser scanning method in the present invention can quickly predict the surface to be measured, fully understand the characteristic information of the surface to be mea...

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Abstract

The invention discloses an optical path system for topography measurement. The optical path system for topography measurement comprises a white light source 1, three light splitting prisms, a microscopic ocular lens 5, a microscopic object lens 6, an interference object lens 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10, the optical path system for topography measurement further has two measurement optical paths and laser measurement paths, for the laser measurement paths, laser starts from the laser device 9, is turned through the third light splitting prism 4, is focused through the microscopic object lens 6 onto a detected surface 11, is reflected by the detected surface 11, respectively passes through the microscopic object lens 6, the third light splitting prism 4 and the second light splitting prism 3 and is projected to the four-quadrant photoelectric sensor 8 for height information measurement of the detected surface 11; laser starts from the laser device 9, is reflected by the detected surface 11, is turned through the second light splitting prism 3, passes through the second light splitting prism 2 and the microscopic ocular lens 5 and is imaged together with illumination background light formed by the white light source 1 to the image sensor 10 to form acquisition images during laser measurement.

Description

technical field [0001] The invention relates to a shape measuring device, in particular to the processing surface quality and shape detection in the manufacturing process of ultra-precision machined mechanical parts and optical components. Background technique [0002] Surface topography refers to the geometry of the interface between the object and the surrounding medium. The basic shape of the surface and surface defect parameters such as waviness, texture, and surface roughness together constitute the characteristics of the original topography of the object surface. The surface morphology formed by machining, surface treatment and other processes directly affects its function and performance. With the rapid development of the defense industry, aerospace and machinery manufacturing and other fields, the demand for ultra-precision machining parts is also increasing, and the surface morphology and structure of products are becoming more and more complex. Therefore, the mecha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 张效栋房丰洲武光创
Owner TIANJIN UNIV
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