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A kind of processing method of mems solid electrolyte oxygen sensor

A solid electrolyte and oxygen sensor technology, which is applied in the field of oxygen sensors, can solve the problems of unsuitable mobile devices, large oxygen sensor size, and high power consumption, and achieve the effects of increased sensitivity, reduced heat capacity and surface area, and reduced power consumption

Active Publication Date: 2019-06-28
盐城悦芯微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this type of oxygen sensor has a large volume and high power consumption, and is not suitable for mobile devices or environments powered by batteries

Method used

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  • A kind of processing method of mems solid electrolyte oxygen sensor
  • A kind of processing method of mems solid electrolyte oxygen sensor
  • A kind of processing method of mems solid electrolyte oxygen sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Such as figure 1 with figure 2 As shown, a MEMS solid electrolyte oxygen sensor includes a support layer 3 of 2 μm, the lower part of the support layer 3 is provided with a silicon substrate 2, the lower surface of the silicon substrate 2 is provided with a thermal insulation groove 1 extending to the support layer 3, and the upper surface of the support layer 3 A sensitive layer is provided, and the sensitive layer includes an oxygen ion solid electrolyte unit 7, and the oxygen ion solid electrolyte unit 7 is connected with a platinum layer 4 to form a series oxygen ion solid electrolyte array, and one side of the sensitive layer is provided with a vent hole 9 , the surface of the sensitive layer is covered with an insulating layer 5, and the surface of the insulating layer 5 is provided with a platinum heating wire 6.

[0035] In the MEMS solid electrolyte oxygen sensor provided in this embodiment, one end of the oxygen ion solid electrolyte unit 7 is exposed to the...

Embodiment 2

[0049] Such as figure 1 with figure 2 As shown, a MEMS solid electrolyte oxygen sensor includes a support layer 3 of 1 μm. The lower part of the support layer 3 is provided with a silicon substrate 2. The lower surface of the silicon substrate 2 is provided with an insulating groove 1 extending to the support layer 3. The upper surface of the support layer 3 is A sensitive layer is provided, and the sensitive layer includes an oxygen ion solid electrolyte unit 7, one side of the sensitive layer is provided with air holes 9, the surface of the sensitive layer is covered with an insulating layer 5, and the surface of the insulating layer 5 is provided with a platinum Heating wire6.

[0050] In the MEMS solid electrolyte oxygen sensor provided in this embodiment, one end of the oxygen ion solid electrolyte unit 7 is exposed to the air, and the other end is isolated from the air through the insulating layer 5, the number of the oxygen ion solid electrolyte unit 7 is 1, and the t...

Embodiment 3

[0063] Such as figure 1 with figure 2 As shown, a MEMS solid electrolyte oxygen sensor includes a support layer 3 of 5 μm, a silicon substrate 2 is provided on the lower part of the support layer 3, a heat insulating groove 1 extending to the support layer 3 is opened on the lower surface of the silicon substrate 2, and the upper surface of the support layer 3 is A sensitive layer is provided, and the sensitive layer includes an oxygen ion solid electrolyte unit 7, and the oxygen ion solid electrolyte unit 7 is connected with a platinum layer 4 to form a series oxygen ion solid electrolyte array, and one side of the sensitive layer is provided with a vent hole 9 , the surface of the sensitive layer is covered with an insulating layer 5, and the surface of the insulating layer 5 is provided with a platinum heating wire 6.

[0064] In the MEMS solid electrolyte oxygen sensor provided in this embodiment, one end of the oxygen ion solid electrolyte unit 7 is exposed to the air, ...

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Abstract

The invention provides an MEMS (micro-electromechanical system) solid electrolyte oxygen sensor and a machining method thereof and belongs to the field of oxygen sensors. The MEMS solid electrolyte oxygen sensor obtained by an MEMS machining process comprises a supporting layer, wherein a silicon substrate is arranged at the lower part of the supporting layer; a sensitive layer is arranged on the upper surface of the supporting layer; the sensitive layer comprises oxygen ion solid electrolyte units; the oxygen ion solid electrolyte units are connected through a platinum layer to form a serial oxygen ion solid electrolyte array; an insulating layer covers the surface of the sensitive layer; and a platinum heating wire is arranged on the surface of the insulating layer. The MEMS solid electrolyte oxygen sensor provided by the invention has the advantages of small size, low power consumption, high sensitivity and long service life.

Description

technical field [0001] The invention relates to the field of oxygen sensors, in particular to a MEMS solid electrolyte oxygen sensor and a processing method thereof. Background technique [0002] The full name of MEMS is Micro Electromechanical System, which refers to a high-tech device with a size of a few millimeters or even smaller. Its internal structure is generally on the order of microns or even nanometers, and it is an independent intelligent system. It is developed on the basis of microelectronics technology (semiconductor manufacturing technology), and integrates high-tech electromechanical devices produced by technologies such as lithography, corrosion, thin film, silicon micromachining, non-silicon micromachining and precision machining. [0003] Oxygen sensors are standard configurations on automobiles. So far, especially in the field of automobiles, various types of oxygen sensors have been proposed and put into practice. [0004] The zirconia oxygen sensor us...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/409
CPCG01N27/409
Inventor 徐琴
Owner 盐城悦芯微电子科技有限公司