On-chip inductor equivalent circuit model used in integrated circuit and extraction method of parameters

Abstract

The invention discloses an on-chip inductor equivalent circuit model used in an integrated circuit. The model comprises an input end, an output end, a series part and a substrate part. The series part and the substrate part are connected between the input end and the output end in parallel. The series part comprises a skin parasitic unit. The skin parasitic unit is connected to the two ends of a resistor of the series part in parallel. The skin parasitic unit comprises a skin parasitic capacitor, a skin parasitic resistor and a skin parasitic inductor which are sequentially connected in series. The invention also provides an extraction method of parameters of the on-chip inductor equivalent circuit model used in the integrated circuit. The on-chip inductor equivalent circuit model comprising the parasitic elements with the skin effect and the substrate transverse coupling effect can improve the fitting precision of simulation and test results; meanwhile, extraction method of the parameters of the circuit model is simpler, and high-precision simulation on on-chip inductors is achieved by the whole circuit model.

Description

technical field [0001] The invention belongs to the field of inductance device models, in particular to an on-chip inductance equivalent circuit for integrated circuits and a parameter extraction method. Background technique [0002] With the continuous development of integrated circuit technology, inductance components are more and more widely used in integrated circuits, and integrated on-chip inductors have also become an important part of radio frequency integrated circuits. Studies have shown that 70%-80% of the on-chip area of ​​an integrated circuit is occupied by on-chip spiral inductors, and the performance of on-chip inductance is an important factor affecting the performance of radio frequency integrated circuits. Therefore, on-chip inductors become an important device object in the research of radio frequency integrated circuits. [0003] The device model is the basis for in-depth research on the device, and an accurate model is a necessary condition for subsequ...

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Problems solved by technology

On this basis, although the substrate inductance and the skin effect branch are introduced, the frequency sensitivity of the skin effect and the substrate lateral coupling effect are not fully considered. This characteristic will not be able to be adjusted by adjusting the existing on-chip inductance, etc. Therefore, the existing on-chip inductance model cannot realize high-precision simulation of on-chip inductance

[0012] To sum up, the current international equivalent circuit models of on-chip inductors do not fully consider the existing skin effect and substrate lateral coupling effect parasitic elements, so the existing transistor small-signal equivalent circuit models cannot achieve the same test results high-precision fitting

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