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Vibration control system and method for absolute grating scale

A technology of vibration control and grating ruler, which is applied in the direction of using optical devices to transmit sensing components, etc., can solve problems such as difficult grating ruler measurement accuracy, and achieve the effect of improving measurement accuracy

Active Publication Date: 2017-06-13
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are many factors that affect the reading accuracy of absolute grating rulers. Among them, the vibration of the grating ruler reading head when the machine tool is moving is an important reason that affects the accuracy of its code reading image. The currently known solution to the vibration of the reading head is to perform data post-processing on the measurement data. The processing method is used to correct the measurement error and improve the accuracy of the measured results, but the image information error caused by the vibration of the grating ruler reading head always exists, so the accuracy improvement of the above method is limited by the accuracy of the original data, and it is difficult to better improve the grating ruler. measurement accuracy

Method used

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  • Vibration control system and method for absolute grating scale
  • Vibration control system and method for absolute grating scale
  • Vibration control system and method for absolute grating scale

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Embodiment 1

[0031] refer to figure 1 with figure 2 , the present invention provides an integrated vibration control system for an absolute grating scale, the grating scale reading head 2 of the absolute grating scale is installed on a carrier platform 1, including a compensation mounting mechanism and a vibration compensation control subsystem , the grating ruler reading head 2 is installed on the carrier platform 1 through a compensation installation mechanism, and the vibration compensation control subsystem is used to read the vibration feedback signal of the carrier platform 1 and the kinematic parameters of the CNC machine tool where the carrier platform 1 is located Finally, the corresponding vibration compensation command is obtained through calculation, and then the vibration compensation of the compensation installation mechanism is realized.

[0032] preferred, see Figure 4 with Figure 5 , the compensating mounting mechanism includes a plurality of shock absorbing assembli...

Embodiment 2

[0051] This embodiment is based on the integrated vibration control method for absolute grating scales in Embodiment 1, such as Image 6 shown, including steps:

[0052] Collecting the vibration feedback signal of the carrier platform 1 and the kinematic parameters of the CNC machine tool where the carrier platform 1 is located;

[0053] According to the obtained vibration feedback signal and kinematic parameters, the corresponding vibration compensation command is calculated and obtained, and then the vibration compensation of the compensation installation mechanism is realized.

[0054] Further as a preferred embodiment, the step of reading the vibration feedback signal of the carrier platform 1 and the kinematic parameters of the CNC machine tool where the carrier platform 1 is located is specifically:

[0055] Vibration sensors are used to collect vibration signals in the X, Y, and Z directions of the carrier platform 1, and at the same time, the motion control instructio...

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Abstract

The invention discloses a vibration control system and method for an absolute grating scale. The system comprises a compensation type mounting mechanism and a vibration compensation control subsystem, the grating scale reading head is installed on a carrier platform through the compensation type mounting mechanism, the vibration compensation control subsystem is used for calculating to obtain a corresponding vibration compensation command after reading a vibration feedback signal of the carrier platform and a kinematic parameter of a numerical control machine tool which the carrier platform is located and further achieving vibration compensation for the compensation type mounting mechanism. According to the vibration control system and method for the absolute grating scale, the vibration compensation for the grating scale reading head can be achieved in the measuring process of the grating scale, the measuring precision of the absolute grating scale is improved, and the vibration control system and method can be applied in the control field of the precision optical measuring system.

Description

technical field [0001] The invention relates to the field of photoelectric measurement technology and the field of vibration control of precision instruments, in particular to an integrated vibration control system and method for an absolute grating ruler. Background technique [0002] Absolute grating ruler system is a position sensor that can directly obtain absolute position at any position within the measurement range without "returning to zero". It is widely used in machining and precision instruments, and its performance affects the platform it uses. Working precision. At present, in the known absolute grating ruler, the reading head of the grating ruler is a camera-type reading method. The current absolute position is obtained by capturing the image corresponding to the position of the code track and performing data processing on the image. Therefore, the original error of the absolute grating ruler comes from The information error of its code-reading image. Absolut...

Claims

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Application Information

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IPC IPC(8): G01D5/353
CPCG01D5/353
Inventor 陈新度邓宏光陈新王晗张莉
Owner GUANGDONG UNIV OF TECH