Auxiliary device for spectral signal acquisition, spectral signal system and semiconductor apparatus

Abstract

The invention provides a device for collecting spectral signals, a spectral signal system and semiconductor equipment. The device that helps to collect spectral signals includes a lens, a cylinder and an adjustable light-transmitting member; wherein, the cylinder is opaque and adjustable in length; the lens is installed at one end of the cylinder; the adjustable light-transmitting member is set on it There is an opening and the size of the opening is adjustable, and it is installed at the other end of the cylinder. The device that helps to collect spectral signals provided by the present invention can effectively suppress local noise and avoid oversaturation of the collected spectral signal intensity, and help to collect spectral signals with a required high signal-to-noise ratio. Therefore, the spectral signal system can By monitoring small changes in the process, the process can be precisely controlled, thereby improving the control accuracy of semiconductor equipment.

Description

technical field [0001] The invention belongs to the technical field of microelectronic processing, and in particular relates to a device for collecting spectral signals, a spectral signal system and semiconductor equipment. Background technique [0002] The endpoint control technology of the process is a key technology in the production of semiconductor processes. With the gradual reduction of the critical dimension of etching and the gradual complexity of the substrate film structure, the requirements for end point control are getting higher and higher. [0003] The existing main principle for realizing process endpoint control is to obtain the spectrum emitted by the polymer produced in the process etching process, and use threshold value control method or slope control method according to the spectrum to accurately grasp the process end point. Based on the above principles, how to obtain spectral signals with high signal-to-noise ratio is the key. However, the current me...

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Problems solved by technology

Based on the above principles, how to obtain spectral signals with high signal-to-noise ratio is the key. However, the current method of directly collecting spectral signals with optical fiber heads often has the problem of low signal-to-noise ratio.

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