Preparing method of flexible OLED display screen thin film
A display and flexible technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve problems such as the reduction of water and oxygen barrier capacity, OLED failure, and impact on display effects, to ensure the barrier effect and low cost , the effect of a wide range of raw materials
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Embodiment 1
[0031] The present embodiment comprises the following steps:
[0032] (1) Ultrasonic cleaning in ethanol solution for 10 minutes to remove the grease on the surface of the plastic substrate, and then rinse with deionized water to remove the salt on the surface of the plastic substrate, the purity is 99.9% at 40°C, and the argon at an ambient pressure of 100Pa Dry the plastic substrate under air protection to obtain a clean plastic substrate;
[0033] (2) On the clean plastic substrate, using an evaporation temperature of 100°C, under vacuum, evaporate methyl acrylate monomer with a thickness of 50nm, and set the substrate temperature to 50°C, so that the acrylic acid evaporated to the substrate The methyl ester monomer is polymerized and cured, and the curing time is 30 minutes. After curing, it condenses into a flexible and transparent film;
[0034] (3) Then SiO 2 The dense film layer of inorganic medium is deposited on the polymer thin film layer by radio frequency sputte...
Embodiment 2
[0037] The present embodiment comprises the following steps:
[0038](1) Ultrasonic cleaning in ethanol solution for 10 minutes to remove the grease on the surface of the plastic substrate, and then rinse with deionized water to remove the salt on the surface of the plastic substrate, the purity is 99.9% at 45°C, and the ambient pressure is argon at 300Pa Dry the plastic substrate under air protection to obtain a clean plastic substrate;
[0039] (2) On the clean plastic substrate, use an evaporation temperature of 100°C to evaporate ethyl acrylate monomer with a thickness of 100nm under vacuum, and set the substrate temperature to 60°C so that the acrylic acid evaporated to the substrate Ethyl monomer is polymerized and cured, and the curing time is 40 minutes. After curing, it condenses into a flexible and transparent film;
[0040] (3) Then the TiO 2 The dense film layer of inorganic medium is deposited on the polymer film layer by radio frequency sputtering. The paramete...
Embodiment 3
[0043] The present embodiment comprises the following steps:
[0044] (1) Ultrasonic cleaning in ethanol solution for 12 minutes to remove the grease on the surface of the plastic substrate, then rinse with deionized water to remove the salt on the surface of the plastic substrate, the purity is 99.9% at 45°C, and the argon at an ambient pressure of 300Pa Dry the plastic substrate under air protection to obtain a clean plastic substrate;
[0045] (2) On the clean plastic substrate, use an evaporation temperature of 110°C to evaporate ethyl acrylate monomer with a thickness of 140nm under vacuum, and set the substrate temperature to 70°C, so that the acrylic acid evaporated to the substrate Ethyl monomer is polymerized and cured, and the curing time is 40 minutes. After curing, it condenses into a flexible and transparent film;
[0046] (3) Then put Al 2 o 3 The dense film layer of inorganic medium is deposited on the polymer thin film layer by radio frequency sputtering. 2...
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