On-line Monitoring Method of Intense Laser Focus Spot Uniformity
A uniform and strong laser technology, applied in the field of strong laser, can solve the problems of the on-line monitoring method of the uniformity of the non-focal spot, the research cannot be carried out smoothly, etc., and achieve the effect of accurate and reliable monitoring results.
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[0025] The method for on-line monitoring of the uniformity of the strong laser focal spot of the present invention is applied to the on-line monitoring of the largest high-power KrF excimer laser system in my country - "Tianguang No. 1". The targeting optical path of "Tianguang-1" consists of six strong laser beams with a wavelength of 248nm. The optical system of the targeting optical path includes six concave mirrors and six focusing lenses. The main steps of its online monitoring are as follows:
[0026] (1) A wedge-shaped beam splitter is arranged in each path of the front end of the target optical path, and each wedge-shaped beam splitter 1 is a fused silica beam splitter coated with an anti-reflection film on both sides, and the optical properties are all the same;
[0027] (2) Installing a monitoring optical system that is exactly the same as the optical system used in the targeting optical path;
[0028] (3) By adjusting the orientation of the monitoring optical syste...
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