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A kind of preparation method of trichlorosilane

A technology of trichlorosilane and polychlorosilane, which is applied in chemical instruments and methods, silicon compounds, halosilanes, etc., can solve the problems of safety and environmental protection hazards, affecting continuous discharge, and difficult storage, etc., so as to improve utilization rate and reduce Production cost, effect of mild conditions

Active Publication Date: 2018-05-04
ASIA SILICON QINGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Chlorosilicon polymers, polychlorosilanes, including tetrachlorodisiloxane (H 2 Si 2 OCl 4 ), pentachlorodisiloxane (HSi 2 OCl 5 ), hexachlorodisiloxane (Si 2 OCl 6 ) and hexachlorodisilane (Si 2 Cl 6 ) and other high-boiling substances, which have high boiling point and high viscosity, often block the pipeline, affect the normal continuous discharge, and are flammable and difficult to store. If it is not handled in time, it will bring great hidden dangers to safety and environmental protection, especially after the scale is enlarged, the problem will become more prominent

Method used

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  • A kind of preparation method of trichlorosilane

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Put the catalyst in O with a volume ratio of 0.15:1 2 And N 2 Activated in the atmosphere for 4h.

[0034] Pass hydrogen and polychlorosilane into a reactor with a reaction temperature of 50°C, a reaction pressure of 0.1 MPa, and an activated catalyst, and the molar mass ratio of hydrogen and polychlorosilane is 1:1, and react to obtain Trichlorosilane.

Embodiment 2

[0036] Put the Ni-Cu alloy in O with a volume ratio of 0.25:1 2 And N 2 Activated in the atmosphere for 6h.

[0037] Pass hydrogen and tetrachlorodisiloxane into a reactor with a reaction temperature of 200°C, a reaction pressure of 2.5MPa, and an activated Ni-Cu alloy, and the molar mass ratio of hydrogen and tetrachlorodisiloxane is 100:1, and make it react to obtain trichlorosilane.

[0038] Pass the trichlorosilane, unreacted hydrogen and tetrachlorodisiloxane into the condensation tower, separate the hydrogen, and then separate and purify the trichlorosilane and tetrachlorodisiloxane to obtain pure trichlorosilane. Chlorohydrin silicon.

Embodiment 3

[0040] The transition metal is in the volume ratio of 0.2:1 O 2 And N 2 Activated in the atmosphere for 5h.

[0041] Pass hydrogen and pentachlorodisiloxane into a reactor with a reaction temperature of 140°C, a reaction pressure of 0.5MPa, and activated transition metals, and the molar mass ratio of hydrogen to pentachlorodisiloxane is 80:1 , And make it react to obtain trichlorosilane.

[0042] Pass the trichlorosilane, unreacted hydrogen and pentachlorodisiloxane into the condensing tower, separate the hydrogen gas and circulate it into the reactor, and then separate the trichlorosilane and pentachlorodisiloxane And purification to obtain pure trichlorosilane.

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Abstract

The invention provides a preparation method of trichlorosilane, and belongs to the technical field of production of organosilicone and polycrystalline silicon. The preparation method of the trichlorosilane comprises the steps of introducing hydrogen and poly-chlorosilane into a reactor containing a catalyst to react to obtain trichlorosilane separately; and activating the catalyst in the reactor in O2 and N2 atmospheres at the volume ratio of (0.15-0.25):1 for 4-6h. The method is clean, environment-friendly, mild in condition, safe in environment, relatively low in energy consumption, simple in process and easy to implement, and industrial promotion and application can be achieved.

Description

Technical field [0001] The present invention relates to the technical field of organic silicon and polysilicon production, in particular to a preparation method of trichlorosilane. Background technique [0002] In the production process of polysilicon or organic silicon, chlorosilicon polymer will inevitably be produced, namely polychlorosilane, including tetrachlorodisiloxane (H 2 Si 2 OCl 4 ), Pentachlorodisiloxane (HSi 2 OCl 5 ), hexachlorodisiloxane (Si 2 OCl 6 ) And hexachlorodisilane (Si 2 Cl 6 ) And many other high-boiling substances, which have high boiling point and high viscosity, often block pipes and affect normal continuous discharge, and are flammable and difficult to store. Direct discharge or extensive treatment will not only cause great harm to the environment, but also raw materials It is a huge waste, and if it is not handled in time, it will bring great hidden dangers to safety and environmental protection, especially after the scale is enlarged. Summary of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
CPCC01B33/1071
Inventor 王体虎肖建忠宗冰尹东林郑连基王振荣行卫国
Owner ASIA SILICON QINGHAI