Glass substrate air flotation device with deformation detection function and detection method

Abstract

The invention discloses a glass substrate air flotation device with a deformation detection function. The glass substrate air flotation device comprises a transporting platform, a fixed platform and a base. The fixed platform is connected with the base through supporting columns. Driving devices used for driving a glass substrate to move are arranged on the two sides of the transporting platform. The transporting platform is provided with a plurality of conveying air holes arranged evenly. A sintered metal porous material is embedded in the top end of each conveying air hole. The bottom of each conveying air hole is connected with an air conveying pipe. The air conveying pipes are connected with a pressure reduction valve through a flowmeter. The pressure reduction valve is connected with an air source through a hose. At least two small holes are formed in the periphery of each conveying air hole of the transporting platform, the bottom of each small hole is connected with a pressure sensor through an air pipe, and the pressure sensors and the signal output end of the flowmeter are connected with an input conversion module. The glass substrate air flotation device with the deformation detection function has the advantages of being clean, free of pollution, heating and magnetism generation and the like, and a pneumatic system is easy to maintain and simple in structure.

Description

technical field [0001] The invention relates to a glass substrate air flotation device with a deformation detection function and a detection method, belonging to the detection field. Background technique [0002] The traditional liquid crystal glass substrate handling adopts the contact transportation method, that is, the workpiece is in direct contact with the surface of the transportation device (such as roller drive, vacuum chuck, etc.), which is likely to cause scratches and cracks on the surface of the glass substrate, and there is also static electricity. Many problems such as metal pollution and metal pollution have seriously affected product quality and have been unable to meet the needs of current technological development. On the other hand, due to the constraints of friction, it is difficult to increase the transport speed in this contact transport mode, which also limits the further improvement of production efficiency. At present, the glass substrate is develop...

AI Technical Summary

Problems solved by technology

[0006] Although the above-mentioned technical solutions can realize non-contact transportation of large glass substrates, none of them can realize real-time monitoring of glass substrate deformation.

In the glass substrate production line, if the glass quality needs to be inspected by machine vision, the deformation of the glass substrate caused by the pressure of the air film must be strictly controlled, otherwise, the bending deformation of the glass substrate will reduce the detection accuracy of defects

Usually, an external laser displacement sensor can detect the deformation of the glass substrate. However, the efficiency of large-scale detection is low and it is prone to large errors.

Increasing the number of laser displacement sensors can improve the efficiency of glass substrate deformation detection, but it also leads to a substantial increase in cost

Images