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Organic vacuum evaporation source

A vacuum evaporation and organic technology, applied in the field of organic vacuum evaporation source equipment, can solve the problems of lack of vacuum equipment, achieve low cost, avoid local overheating, and uniform heating

Pending Publication Date: 2017-07-28
DALIAN JIAOTONG UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the equipment required for the acquisition of organic thin film devices, that is, the organic vacuum evaporation source, does not have a relatively mature vacuum equipment independently developed for the evaporation of organic matter. The main technical difficulties lie in how to achieve low-temperature evaporation and how to keep the temperature at a low temperature. Level

Method used

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  • Organic vacuum evaporation source
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Examples

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Embodiment Construction

[0037] Such as figure 1 , figure 2 , image 3 , Figure 4 and Figure 5 An organic vacuum evaporation source shown includes: a heating system, a cooling system, a temperature measuring system, a control system and connecting components;

[0038] The heating system includes: electrode port 2, heating wire 16, metal heat conductor 21, crucible 17, fixing ring 15 and connector 7;

[0039] Among them, the heating wire 16 and the four fixing rings 15 form a hollow cylindrical heating core; one end of the electrode port 2 is connected with the power supply joint of the connecting piece 7 and the heating wire 16, and the other end is connected to the power supply for heating; the metal heat conductor 21 is Columnar body, the top end of the metal heat conductor 21 is provided with an axially downward crucible groove 21.1 for embedding the crucible 17, and the bottom end is provided with an axially upwardly extending heating core embedding groove 21.2 for embedding the heating cor...

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Abstract

The invention discloses an organic vacuum evaporation source which comprises a heating system, a cooling system, a temperature measuring system, a control system and a connecting component. Electric heating wires in the heating system are electrified for heating a metal heat conductor, and when a temperature reaches a vaporization temperature of an organic matter, the organic matter is evaporated to generate gas phase molecules; through rotation closing of a rotating baffle of the control system, the starting and stopping of a film coating process are realized; the cooling system is in a working state all the time, so as to avoid too high heating temperature and realize the effect of uniform heating of a crucible in a cavity of the metal heat conductor; a thermocouple wire of the temperature measuring system directly measures the temperature of the metal heat conductor, and then the heating temperature of the organic matter is fed back; and the reasonable connection of the connecting component ensures normal working of entire equipment.

Description

technical field [0001] The invention relates to the field of vacuum equipment, in particular to an organic vacuum evaporation source equipment. Background technique [0002] Vacuum coating technology originated in the 1930s, and it was not until the 1980s that industrialized mass production was formed. Vacuum coating is a method of heating the source of the film to be formed in the evaporator in a vacuum environment, making its atoms or molecules vaporize and escape from the surface, forming a vapor flow, incident on the substrate or the surface of the substrate, and solidifying to form a solid film. Vacuum coating technology is an important branch of vacuum application technology and the most promising surface coating application technology. It has a series of excellent characteristics that cannot be replaced by other processes: it is not affected by the material and shape of the coated component; Thickness can be controlled; functional surface coating can be plated. Comp...

Claims

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Application Information

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IPC IPC(8): C23C14/26C23C14/12C23C14/54
CPCC23C14/12C23C14/26C23C14/54
Inventor 郭方准李红娟臧侃董华军张晓敏郑研
Owner DALIAN JIAOTONG UNIVERSITY
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