Homogeneous 'scintillator-semiconductor-scintillator' composite X-ray detector
A technology of composite detectors and linear array detectors, which is applied in the field of sensors, can solve the problems of complex process and low efficiency, and achieve the effect of simple production method, single production principle and short production cycle
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[0029] Such as figure 1 As shown, it includes a front scintillator 1, a semiconductor photoconductive detector, and a rear scintillator 3. The semiconductor photoconductive detector comprises a semiconductor substrate 2 (the substrate is not doped), an electrode one 4, an electrode two 5 and lead wires;
[0030] The same-substrate "scintillator-semiconductor-scintillator" composite X-ray detector can be obtained by general thin film growth techniques, such as magnetron sputtering or sol-gel method.
[0031] Take the magnetron sputtering method as an example:
[0032] First, prepare the target material of the matrix and the dopant substance. If ZnO is used as the matrix, Zn can be used as the matrix target material, and Ga or In is used as the dopant substance.
[0033] Using double-target magnetron sputtering equipment, first load two kinds of targets, fix two electrodes (such as interdigital electrodes) on the substrate, close the vacuum chamber, and start vacuuming.
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