A high-precision interferometer gas static pressure vibration reduction base

Abstract

The invention aims at providing a gas static pressure vibration attenuation base applied to a high precision frequency conversion interferometer. The gas static pressure vibration attenuation base mainly comprises structures and components including a vibration attenuation base supporting base, a vibration attenuation base table top, a left and right side connecting plate, a left and right bottom face pressing plate, stand columns, porous material blocks and the like; the four cylindrical stand columns of the vibration attenuation base are made of natural granite materials, and therefore the stability of a working table is better guaranteed; the vibration attenuation base table top, the left and right side connecting plate, the left and right bottom face pressing plate, the corresponding porous material blocks and the like form an air floating structure, and therefore vibration attenuation and vibration isolation effects can be achieved; the left and right side connecting plate, front and back baffles and soft materials guarantee that the vibration attenuation base table top is stable in the air floating process; and the porous material blocks and air channels which are in special design layout are distributed on left and right bottom plates and the vibration attenuation base table top, and therefore the gap homogeneity and the stable invariance in the air floating process are achieved.

Description

technical field [0001] The invention relates to a high-precision interferometer gas static pressure vibration reduction base. Background technique [0002] With the development of science and technology, precision and ultra-precision machinery manufacturing is becoming more and more important, so ultra-precision measurement technology is also becoming more and more important. Interferometer is one of the important precision measurement instruments. It is used in various fields, especially in optics. Applications in the field of measurement are becoming more and more important. At the same time, the gas static pressure air bearing guideway has a series of advantages such as low friction power consumption, high motion accuracy, no crawling and creeping at low speed, stable motion, long life, and no pollution. It is widely used in three-coordinate measuring machines, ultra- Precision machine tools, electronic processing, medical equipment fields. However, the motion design of...

AI Technical Summary

Problems solved by technology

However, the dual-gas static pressure air-floating guide rail movement design generally adopted in the field of machine tools at present has the disadvantage of uneven air gap caused by air pressure difference between the two guide rails, and does not give full play to the advantages of high precision and good stability of air flotation.

At the same time, most of the current damping bases adopt a four-column gas spring support design, which also does not give full play to the advantages of high precision and good stability of air flotation

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