Angular velocity detection circuit, angular velocity detection device, electronic apparatus, and moving object
A technology of angular velocity detection and angular velocity, which is applied in speed/acceleration/shock measurement, navigation through speed/acceleration measurement, and measurement devices, etc. It can solve problems such as increasing S/N of difficult angular velocity signals and increasing noise components
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[0068] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the embodiment described below is not an aspect which unduly limits the content of this invention described in a claim. In addition, not all the configurations described below are necessarily essential configuration requirements of the present invention.
[0069] 1. Angular velocity detection device
[0070] 1-1. First Embodiment
[0071] Structure and operation of angular velocity detection element
[0072] First, the angular velocity detection element 10 included in the angular velocity detection device 1 according to the present embodiment will be described with reference to the drawings. figure 1 It is a top view schematically showing the angular velocity detection element 10 . figure 2 It is a cross-sectional view schematically showing the angular velocity detection element 10 . In addition, in figure 1 In FIG. 3 , X-axis, Y-ax...
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