An absorbing optical modulator based on graphene coplanar traveling wave electrodes
A technology of traveling wave electrodes and optical modulators, which is applied in the field of optoelectronics, can solve the problems of limited RC constant, small modulation bandwidth, and large modulator volume, and achieve the effects of improving modulation efficiency, reducing size, and simple preparation process
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[0040] The schematic diagram of the structure of the graphene-based coplanar traveling-wave absorption optical modulator in this embodiment is as follows: figure 1 , figure 2 and image 3 shown. A light wave with a wavelength of 1.55 μm is used, and the light wave is connected from the strip optical waveguide 2 port. The height and width of the strip optical waveguide 2 are 220nm and 500nm respectively, and Si material is used; the first dielectric filling layer 31, the second dielectric filling layer 32 are all HSQ materials; the first dielectric isolation layer 61 and the second dielectric isolation layer 62 are respectively 5nm and 20nm thick SiN materials; the first graphene stripline 4, the second graphene stripline 7, and the third graphene stripline The material of the graphene stripline 8 is single-layer graphene, and the distance between each other is 5 μm; the width of the first graphene stripline 4 covered on the surface of the strip optical waveguide 2 is 5 μm; ...
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