Triangle-shaped opening-closing box type electrode semiconductor detector

Abstract

The invention discloses a triangle-shaped opening-closing box type electrode semiconductor detector. The triangle-shaped opening-closing box type electrode semiconductor detector is formed by a semiconductor substrate, trench electrodes formed by etching the semiconductor substrate, and central cylindrical electrodes, which are in a nested arrangement. Each of the trench electrodes is a diamond-shaped cylinder formed by superposing bottom edges of two equilateral triangles. Each trench electrode is corresponding to the two central cylindrical electrodes, which are disposed on the centers of the above mentioned two equilateral triangles. The trench electrodes and the central cylindrical electrodes are hollow electrodes, which are formed by ion diffusion after etching. An electrode contact layer is disposed on the trench electrodes and the central cylindrical electrodes on the top surface of the triangle-shaped opening-closing box type electrode semiconductor detector in a covered manner, and a silica insulation layer is disposed on the other semiconductor part of the top surface in a covered manner, and a silica substrate layer is disposed on the bottom surface of the above mentioned detector. The triangle-shaped opening-closing box type electrode semiconductor detector is advantageous in that a dead zone is eliminated, and the etching technology is a penetrating etching technology; during working, double-sided incidence of particles is realized; reaction is more sensitive, and detection efficiency is higher.

Description

technical field [0001] The invention relates to the field of semiconductor detectors in high-energy physics, astrophysics, aerospace, military, medical and other technical fields, in particular to a triangular open-close type box-type electrode semiconductor detector. Background technique [0002] Semiconductor detectors are mainly used in high-energy physics, astrophysics and other fields. They have the characteristics of high energy resolution, high sensitivity, fast response time, strong radiation resistance, etc., and are easy to integrate. They have a significant role in X-ray and high-energy particle detection. Value. In the fields of high-energy physics and astrophysics, detectors work under strong radiation conditions, and require high energy resolution, response speed, etc. of semiconductor detectors, and have low leakage current and low full depletion voltage. There are differences in their size. Require. [0003] The semiconductor detector works under reverse bi...

AI Technical Summary

Problems solved by technology

Moreover, when the "three-dimensional trench electrode semiconductor detector" is working, the particles can only be incident on one side, which will reduce the detection efficiency

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