The invention provides an atmospheric
semiconductor detector and a manufacturing process thereof, and relates to the field of
semiconductor detectors. The invention provides a
process manufacturing flow of a front-end module. Secondly, the invention provides the front-end module prepared by the
process manufacturing flow described in the first aspect of the invention. The invention further provides an atmospheric
semiconductor detector which comprises the front-end module in the second aspect of the invention. The invention further provides a use of the front-end module as described in the second aspect of the invention as a detection element of the atmospheric
semiconductor detector as described in the third aspect of the invention. In the fifth aspect, the invention provides an assembling method of the
atmosphere type
semiconductor detector in the third aspect. The frame
refresh rate of the atmospheric
semiconductor detector provided by the invention is greater than or equal to 1kHz, the
dynamic range is greater than or equal to 104ph. / pixel / pulse (at) 12keV, the atmospheric semiconductor
detector has single
photon sensitivity, S / N is greater than or equal to 5 (at) 12keV, the pixel size is less than or equal to 200 microns * 200 microns, the number of pixels is greater than or equal to 65536, the sensitive area is greater than or equal to 2.5 cm * 10.2 cm, the
quantum efficiency is greater than or equal to 80% (at) 12keV, and the response energy region is 6keV-20keV.