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Graphene film electrode capacitive micro-accelerometer and preparation method thereof

A technology of graphene film and accelerometer, which is applied in the direction of measuring acceleration, speed/acceleration/impact measurement, instruments, etc., can solve the problems of low thermal conductivity at room temperature, device output drift, etc., achieve low thermal conductivity and improve stability and reliability, the effect of excellent conductivity

Inactive Publication Date: 2017-11-10
CHONGQING UNIV
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  • Application Information

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Problems solved by technology

Moreover, due to the low room temperature thermal conductivity of metals and low-resistivity single crystal silicon, the self-heating of traditional capacitive micro-accelerometers during use can easily cause device output drift, resulting in large errors

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  • Graphene film electrode capacitive micro-accelerometer and preparation method thereof

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Embodiment Construction

[0016] In order to understand the content of the present invention more clearly, the present invention will be further described below based on specific embodiments and in conjunction with the accompanying drawings.

[0017] A capacitive micro-accelerometer with a graphene film as an electrode mainly includes an upper and a lower cap layer 1, a movable structure layer (including a base 2, a cantilever beam 3 and a mass 4) and an electrode layer 8. In this embodiment, the upper and lower capping layers 1 are made of glass, the movable structure layer (including the substrate 2, the cantilever beam 3 and the mass block 4) is single crystal silicon with an n-type resistivity of 1-10Ω·cm, and the electrode layer 8 is Graphene film. Its concrete preparation steps are as follows:

[0018] (1) A cavity 7 and a boss 5 with a certain depth are prepared in the inner electrode area of ​​the upper and lower capping layers 1 by ultraviolet lithography and wet etching. The cavity 7 provid...

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Abstract

The invention discloses a capacitive micro-accelerometer and a preparation method thereof, and belongs to the field of microelectronic mechanical systems, wherein a graphene film is adopted as an electrode of the capacitive micro-accelerometer. The capacitive micro-accelerometer mainly comprises an upper cover cap layer, a lower cover cap layer, a movable structure layer and an electrode layer. The invention is mainly characterized in that a metal electrode or a low-resistivity monocrystalline silicon electrode in a traditional capacitive micro-accelerometer is replaced by the graphene film. The graphene film is better in electricity conductivity and thermal conductivity and lower in residual stress. Therefore, the stability and the reliability of the capacitive micro-accelerometer can be improved.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems, in particular to a capacitive micro-accelerometer using a graphene film as an electrode and a preparation method thereof. Background technique [0002] Micro accelerometer is a kind of mechanical sensor based on micro-nano processing technology, which is widely used in the measurement of parameters such as inertial force, vibration, impact and tilt angle. According to different working principles, micro accelerometers can be divided into piezoresistive, capacitive, piezoelectric, tunneling and resonant types. The capacitive micro-accelerometer has a simple manufacturing process, small size, and light weight. It has unique advantages in temperature characteristics, measurement accuracy, closed-loop control, and monolithic integration with circuits. It is widely used in automotive electronics, smart phones, medical instruments and Military equipment and many other fields. Capacitiv...

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Application Information

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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 金伟锋牟笑静尚正国王婧文
Owner CHONGQING UNIV