Hydrogen bromide purification technology

A hydrogen bromide and process technology, which is applied in the field of hydrogen bromide purification process, can solve the problems that the hydrogen bromide production process needs to be improved, and achieve the effect of convenient adjustment and high purification degree

Active Publication Date: 2017-11-17
绿菱电子材料(天津)有限公司
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  • Abstract
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Problems solved by technology

The production process of hydrogen bromide un

Method used

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  • Hydrogen bromide purification technology
  • Hydrogen bromide purification technology

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Embodiment Construction

[0036] The present invention will be described in further detail below in conjunction with the accompanying drawings. Wherein the same components are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the directions in the drawings, and the words "bottom" and "top "Face", "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.

[0037] Such as figure 1 As shown, a hydrogen bromide purification process includes a primary rectification tower 2, a secondary rectification tower 3, an adsorber 4, a storage tank 5, and a gas cylinder 62 inflating device 6 arranged in sequence. The hydrogen bromide gas can be produced directly after the reaction of hydrogen and bromine in the reactor 1, and the hydrogen bromide produced enters the primary rectification tower 2 through a pipeline, and a pressure red...

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Abstract

The invention discloses a hydrogen bromide purification technology. The purification technology is characterized in that a primary rectifying tower, a secondary rectifying tower, an adsorber, a material storage tank and a gas cylinder inflating device are arranged in sequence, the primary rectifying tower and the secondary rectifying tower are both provided with liquid nitrogen cooling devices which conduct refrigeration, and the aims of high purification degree and application on industrial production are achieved.

Description

technical field [0001] The invention relates to a special gas purification process, in particular to a hydrogen bromide purification process. Background technique [0002] As the environmental requirements become more and more stringent, traditional high-purity electronic-grade fluorocarbon special gases have increasingly obvious effects on the environment, such as the destruction of the ozone layer, and their use has been greatly restricted. Therefore, the development and realization of green and environmentally friendly electronic Large-scale production of high-grade special gases has important practical significance for the development of my country's future electronics industry. High-purity hydrogen bromide (HBr) is used for etching semiconductor phosphorus-doped n-type polysilicon, phosphorus-doped single crystal silicon or two-dimensional semiconductors, and is the first choice for fluorocarbon gas substitute products. The plasma etching technology using hydrogen bromi...

Claims

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Application Information

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IPC IPC(8): C01B7/09
Inventor 王新鹏赵沙沙邸士强汤萍
Owner 绿菱电子材料(天津)有限公司
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