Polysilicon ingot furnace with diversion device
A polycrystalline silicon ingot furnace and a flow guiding device technology, which are applied in the directions of polycrystalline material growth, crystal growth, chemical instruments and methods, etc., can solve the problem that the automatic crystal growth process cannot be carried out normally, liquid silicon is difficult to form a rotating flow field, and crystal growth is difficult. Inconvenient speed measurement and other problems, to achieve the effect of reducing subcooling, uniform radial resistivity, and improving yield
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Embodiment approach 1
[0061] A kind of polysilicon ingot furnace with guide device of the present invention, as figure 2 As shown, the ingot casting furnace includes a furnace body 11, a cage frame 13, a lifting screw 131, a heat insulation cage 14, a heater 15, a heat exchange platform 16, a graphite column 17, a graphite tube 123, a gas delivery pipe 50 and a flow guide device 20. The furnace body 11 includes an upper furnace body 111 , a lower furnace body 112 and a top end cover 113 , the upper furnace body 111 covers the lower furnace body 112 , and the top end cover 113 covers the top opening of the upper furnace body 111 . Described cage frame 13 is made of 4 side walls, and top surface and bottom surface are open. The cage frame 13 is arranged in the furnace body 11 , and is suspended on the furnace roof of the upper furnace body 111 through a lifting screw 131 . The heat insulation cage 14 is a square cavity composed of four side heat insulation panels 141 , one top insulation panel 142...
Embodiment approach 2
[0070] A kind of polysilicon ingot furnace with guide device of the present invention, as Figure 9 As shown, the ingot casting furnace includes a furnace body 11, a guide assembly 12, a cage frame 13, a lifting screw 131, a heat insulation cage 14, a heater 15, a heat exchange platform 16, a graphite column 17, a gas pipe 50 and a guide Flow device 30. The furnace body 11 comprises an upper furnace body 111, a lower furnace body 112 and a top end cover 113. The upper furnace body 111 is covered on the lower furnace body 112, and the top end cover 113 is covered on the top opening of the upper furnace body 111. The top end cover 113 There is an observation window 114 in the middle. The cage 13 is composed of four sidewalls, the top and the bottom are open, and the cage 13 is suspended on the furnace roof of the upper furnace body 111 through a lifting screw 131 . The heat insulation cage 14 is a square cavity composed of four side heat insulation panels 141 , one top insulat...
Embodiment approach 3
[0078] A kind of polysilicon ingot furnace with guide device of the present invention, as Figure 16 As shown, the polysilicon ingot casting furnace includes a furnace body 11, a guide assembly 12, a cage frame 13, a lifting screw 131, a heat insulation cage 14, a heater 15, a heat exchange platform 16, a graphite column 17, a gas delivery pipe 50 and Flow guiding device 40. The furnace body 11 comprises an upper furnace body 111, a lower furnace body 112 and a top end cover 113. The upper furnace body 111 is covered on the lower furnace body 112, and the top end cover 113 is covered on the top opening of the upper furnace body 111. The top end cover 113 There is an observation window 114 in the middle. The cage 13 is composed of four sidewalls, the top and the bottom are open, and the cage 13 is suspended on the furnace roof of the upper furnace body 111 through a lifting screw 131 . The heat insulation cage 14 is a square cavity composed of four side heat insulation panels...
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