Subboiling Distillation Unit and Its Application

Abstract

The invention belongs to the technical field of preparation of electronic-grade reagents and relates to a sub-boiling distillation device and an application thereof. The sub-boiling distillation device comprises a tank body, a preheating device and a condensing device, wherein a falling film heat exchanger and a gas purging device are arranged in the tank body; the gas purging device is arranged on one side of the falling film heat exchanger and used for purging a gaseous product produced in the falling film heat exchanger; a raw material inlet is formed in the top of the tank body, a raffinate outlet is formed in the bottom, and a gas outlet is formed in the side part; the preheating device is connected with the raw material inlet, the gas outlet is connected with the condensing device, and the raffinate outlet is connected with the preheating device. The sub-boiling distillation device can effectively increase evaporation efficiency, is high in yield, time-saving, low in energy consumption, reasonable in structure, low in cost, convenient to operate, good in economic benefit and easy to popularize and apply.

Description

technical field [0001] The invention belongs to the technical field of preparation of electronic-grade reagents, and relates to a sub-boiling distillation device for preparing electronic-grade reagents or ultra-clean high-purity reagents, in particular to a sub-boiling distillation device and its application. Background technique [0002] High-purity electronic-grade chemicals refer to ultra-clean and high-purity reagents and solvents used in the electronics industry. They are mainly used for chip cleaning, corrosion, and silicon wafer surface cleaning, including photoresist thinners, photosensitizers, and photosensitive agents for chip processing. Acid-generating agent, etchant, stripping agent, cleaning agent, chemical mechanical polishing abrasive compounding agent for chip, electroplating solution, etc. Electronic-grade chemicals are key basic chemical materials in the production of large-scale and ultra-large-scale integrated circuits (ICs). They are used in many proces...

AI Technical Summary

Problems solved by technology

[0005] Although the sub-boiling distillation method can directly prepare C in the laboratory at present 12 Level electronic grade reagents, but there are still defects such as very low evaporation efficiency, slow preparation speed, very small output, and high time and material consumption.

Moreover, the current sub-boiling distillation device still has problems such as repeated evaporation and condensation of the solution and difficulty in controlling the temperature of the evaporation surface, which is not conducive to industrial scale production and cannot be applied to industrial production.

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