Grating Displacement Measuring Method for Long Stroke and High Accuracy Measurement
A technology for grating displacement and grating measurement, which is applied in the field of displacement measurement based on diffraction gratings. It can solve problems such as installation difficulties, light source energy reduction, and large volume, and achieve the effects of compact structure, low environmental sensitivity, and small volume.
Active Publication Date: 2019-11-05
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
The use of multiple reading heads makes the system larger and more difficult to install. Because there are more reading heads, the energy of the light source will also be reduced a lot, and each reading head needs a receiving system, which brings great harm to the later data processing. huge pressure
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[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0023] The long-stroke, high-precision grating displacement measurement method of the present invention is realized based on the long-stroke, high-precision grating displacement measurement system. first reference figure 1 , the long-stroke, high-precision measurement grating displacement measurement system provided by the embodiment of the present invention, the high-line density grating 1 is figure 1 The three high-line density gratings 1 are arranged in the shape of a "pin" to form a measurement grating, and the left end of the high-line density grating 1 on the upper side is carri...
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The invention discloses a long-stroke, high-precision measurement grating displacement measurement method, which comprises the following steps: a dual-frequency laser emits orthogonally polarized dual-frequency laser light which is divided into two beams of light by a beam splitting prism and a 90° deflection mirror, and Respectively incident on the two polarization beam splitters and split by the two polarization beam splitters into P light and S light; the P light and S light become right-handed circularly polarized light and left-handed circularly polarized light after passing through four quarter-wave plates ; The right-handed and left-handed circularly polarized light are respectively reflected by two plane mirrors, and then incident on the measuring grating at the Littrow angle; the measuring grating moves, and the diffracted light carrying the displacement information returns in the same way and passes through a quarter wave respectively After the chip, they become S light and P light respectively, which are transmitted by two polarization beam splitters, superimposed on the output surfaces of the two polarization beam splitters, and received by two receivers. The invention can realize precise displacement measurement, the reading head has compact structure, small volume, low sensitivity of the system to the environment, and greatly reduces the cost of controlling the measurement environment.
Description
technical field [0001] The invention relates to a displacement measurement method based on a diffraction grating, in particular to a high-precision large-stroke grating displacement measurement method used for the displacement measurement of a workbench in the field of precision processing. Background technique [0002] Precision displacement measurement technology plays a very important role in the fields of semiconductor processing, precision machinery manufacturing, large-size diffraction grating manufacturing, and biomedicine. And the precision displacement measurement technology required in these fields is characterized by a large measurement range, which can reach meter-level dimensions; high measurement resolution and precision, which can reach nanometer and sub-nanometer precision. For example, the use of scanning interference exposure technology to manufacture meter-scale diffraction gratings requires the measurement accuracy of the step distance of the workbench an...
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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 李文昊吕强巴音贺希格宋莹刘兆武王玮
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI