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Deplating tool

A deplating and tooling technology, applied in the field of sputtering, can solve the problems of inconvenient operation, poor deplating effect, waste of manpower, etc., and achieve the effect of easy operation, low cost and simple structure

Inactive Publication Date: 2018-01-09
丁芸娉
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has the disadvantages of inconvenient operation, waste of manpower and poor deplating effect in actual practice.

Method used

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  • Deplating tool
  • Deplating tool

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Embodiment Construction

[0018] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0019] see figure 1 and figure 2 As shown, in this embodiment, a deplating tooling includes a frame 1, on which a plurality of support plates 2 are fixed at parallel intervals along the height direction, and each support plate 2 is provided with an outer frame 3 , the outer frame 3 is connected to the frame 1 using a drawer structure. The outer frame 3 has a square structure as a whole, and several support rods 4 are fixed at intervals in the outer frame 3, and the distance between two adjacent support rods 4 is smaller than the width of the deplating fixture. The support rods 4 and the outer frame 3 They are all welded by square tubes, and the width of the support rods 4 is greater than the width of the square tubes used in the outer frame 3 .

[0020] The inner side of the side 6 parallel to t...

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PUM

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Abstract

The invention discloses a deplating tool comprising an outer frame. The overall outer frame is of a square structure. A plurality of support rods are fixed in the outer frame at intervals. The interval between every two adjacent support rods is smaller than the width of deplating jiga, and every two adjacent support rods are provided with a plurality of clamping grooves correspondingly. Each deplating jig is inserted into the space between two corresponding support rods. When deplating is conducted on sputtering jigs through the deplating tool, each sputtering jig only needs to be inserted into two clamping grooves formed correspondingly in a spaced mode and is supported by the two clamping grooves. The structure is simple, cost is low, operation is convenient, manpower is saved, meanwhile, each sputtering jig is arranged independently in a spaced mode, and the deplating effect is ensured.

Description

technical field [0001] The invention belongs to sputtering technology, in particular to a deplating tooling. Background technique [0002] Sputtering, usually referred to as magnetron sputtering, belongs to the high-speed low-temperature sputtering method. The process requires a vacuum degree of about 1×10-3Torr, that is, a vacuum state of 1.3×10-3Pa filled with inert gas argon (Ar) , and apply a high-voltage direct current between the plastic substrate (anode) and the metal target (cathode), the electrons generated by the glow discharge (glow discharge) excite the inert gas to generate plasma, and the plasma converts the atoms of the metal target Blow out and deposit on plastic substrate. The principle is: bombard the surface of the material with charged particles with tens of electron volts or higher kinetic energy, sputtering it out into the gas phase, which can be used for etching and coating. The number of atoms sputtered by an incident ion is called the sputtering yi...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23G3/00
Inventor 丁芸娉
Owner 丁芸娉