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Graphite boat saturation double-layer film structure, coating process and graphite boat

A graphite boat and double-layer film technology, applied in the field of solar cells, can solve the problems of increased boat replacement cost, poor coating uniformity, boat loss, etc., achieve long-term coating uniformity, reduce saturation process time, and prevent Effect of graphite boat loss

Pending Publication Date: 2018-01-09
HANWHA SOLARONE QIDONG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Going round and round, not only wastes a lot of time, but also causes serious loss of boats due to the pickling and oxidation process of the boats, and the uniformity of the coating gradually deteriorates with the prolongation of use time, which greatly increases the replacement cost of the boats

Method used

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  • Graphite boat saturation double-layer film structure, coating process and graphite boat
  • Graphite boat saturation double-layer film structure, coating process and graphite boat
  • Graphite boat saturation double-layer film structure, coating process and graphite boat

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] refer to Figures 1 to 2 , a graphite boat saturated coating in this embodiment has a double-layer film structure, including a corrosion-resistant film deposited on the graphite boat and a passivation film deposited on the corrosion-resistant film. The corrosion-resistant film in this embodiment is a SiC film, and the passivation film is a SixNy film.

[0029] The present embodiment also provides a graphite boat saturated double-layer coating process, comprising the following steps:

[0030] Step S1: Prepare the graphite boat to be saturated

[0031] Put the graphite boat into 25% HF solution for cleaning, remove the SixNy layer, dry and assemble after cleaning.

[0032] Step S2: Baking

[0033] Send the cleaned graphite boat to the tubular PECVD furnace tube to start the saturation process, vacuumize the tubular PECVD and raise the temperature to 450°C. When the temperature reaches 450°C, N 2 , the flow rate is 10slm, and the graphite boat is baked for 20 minutes....

Embodiment 2

[0041] This embodiment is basically the same as Embodiment 1, except that the specific process parameters for depositing the SiC film in this embodiment are: deposition temperature 350°C, CH 4 Flow rate is 600sccm, SiH 4 The flow rate is 800sccm, the pressure is 1700mTorr, the deposition power is 7000W, the deposition ends when the deposition time reaches 90min, and the SiC film thickness is 0.5um.

[0042] The specific process parameters for depositing SixNy film are: deposition temperature is 350°C, NH3 Flow rate of 7slm, SiH 4 The flow rate is 1000sccm, the pressure is 2200mTorr, the deposition power is 9000W, the deposition ends when the deposition time reaches 8min, and the thickness of the SixNy film is 100nm.

Embodiment 3

[0044] refer to Figure 3 to Figure 4 , a graphite boat saturated coating in this embodiment has a double-layer film structure, including a corrosion-resistant film deposited on the graphite boat and a passivation film deposited on the corrosion-resistant film. The corrosion-resistant film of this embodiment is Al 2 o 3 film, the passivation film is SixNy film.

[0045] The present embodiment also provides a graphite boat double-layer coating process, comprising the following steps:

[0046] Step S1: Prepare the graphite boat to be saturated

[0047] Put the graphite boat into 25% HF solution for cleaning, remove the SixNy layer, dry and assemble after cleaning.

[0048] Step S2: Baking

[0049] Send the cleaned graphite boat to the tubular PECVD furnace tube to start the saturation process, vacuumize the tubular PECVD and raise the temperature to 400°C. When the temperature reaches 400°C, N 2 , the flow rate is 10slm, and the graphite boat is baked for 20 minutes.

[...

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Abstract

The invention discloses a graphite boat saturation double-layer film structure, a coating process and a graphite boat. The graphite boat saturation double-layer film structure includes a corrosion-resistant film deposited on the graphite boat and a passivation film deposited on the corrosion-resistant film. The graphite boat double-layer film structure includes the inner corrosion-resistant film and the outer passivation film. The corrosion-resistant film is insulating, hard and compact. During disassembling, pickling, drying and reassembling of the graphite boat in the subsequent period, thecorrosion-resistant film can be retained on the surface of the graphite boat because of the corrosion resistance, so as to prevent the graphite boat sheet from being further corroded and oxidized andprotect the graphite boat sheet. When a saturation process is carried out again, a good saturation effect can be achieved by plating a thin passivation film, the graphite boat can be protected for a long time, and the graphite boat can always maintain good coating uniformity. Through the coating process of the invention, the time of the overall graphite boat saturation process can be reduced, theloss of the graphite boat can be prevented, and better long-term coating uniformity can be obtained.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a tubular PECVD graphite boat saturated double-layer film structure, a coating process and a graphite boat deposited with the double-layer film structure. Background technique [0002] With the continuous development of photovoltaic technology, solar cell products, which are semiconductor devices that convert solar energy into electrical energy, have been rapidly developed. PECVD (Plasma Enhanced Chemical Vapor Deposition; Plasma Enhanced Chemical Vapor Deposition) process is an important link in the preparation process of silicon solar cells, and graphite boat is a necessary material in tubular PECVD. [0003] At present, the graphite boat used in tubular PECVD has a porous structure. In order to deposit a uniform passivation film, it is necessary to pre-deposit a thick passivation film layer on the surface of the boat before use, so as to eliminate the influence of the poro...

Claims

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Application Information

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IPC IPC(8): H01L21/673H01L31/18C23C16/458
CPCY02P70/50
Inventor 沈磊磊董敬桃丁建明崔钟亨
Owner HANWHA SOLARONE QIDONG
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