High-voltage electrode flange for switching between high-vacuum chamber and high-pressure chamber

Abstract

The invention discloses a high-voltage electrode flange for switching between a high-vacuum chamber and a high-pressure chamber. The high-voltage electrode flange comprises a stainless steel flange cylinder, a potting epoxy resin insulator, an insulating ceramic body and an oxygen-free copper electrode which form a coaxial structure, the high-vacuum chamber with a vacuum degree range of 10<-2>-10<-5>Pa and the high-pressure chamber with a pressure value range of 0.2-0.4MPa can be mutually isolated by the structure, and the problem of high voltage such as creepage, glow discharge and corona canbe effectively solved when 20-130KV direct-current high voltage is conducted by the oxygen-free copper electrode by the aid of a banana jack and an anti-creeping electric ring. The high-voltage electrode flange is reasonable in design, moderate in size, easy to manufacture, safe, reliable and suitable for connection of standard flange connectors of various high-vacuum chambers and high-pressure chambers, raw materials are easily acquired, the stainless steel flange cylinder, the potting epoxy resin insulator, the insulating ceramic body, polytetrafluoroethylene sealants and the oxygen-free copper electrode are hermetically connected in an overlapped manner, so that the gas tightness of the whole electrode flange is greatly enhanced, and the high-voltage electrode flange can continuously work in high-voltage feeding links in accelerator applications.

Description

technical field [0001] The invention relates to the fields of high-voltage electric appliance technology and particle accelerators, in particular to a high-voltage electrode flange used for connecting high-vacuum chambers and high-pressure chambers. Background technique [0002] In the field of accelerators, in order to accelerate particles, the particles are generally put into a vacuum for accelerated motion, which can reduce the kinetic energy loss and trajectory changes caused by the collision of other particles during the movement of the particles; generally speaking, the acceleration of the particles is also It needs the attraction of multi-level electrodes to achieve it. If you want to make the particles get as fast as possible, you need a high-voltage electrode. At present, the rated voltage of the electrode can reach high voltage (10KV ~ 220KV). According to the knowledge of high-voltage technology, in order to To prevent the occurrence of high-voltage glow discharge...

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Problems solved by technology

[0003] Aiming at the above defects or improvement needs of the prior art, the present invention provides a high-voltage electrode flange for switching between a high-vacuum chamber and a high-pressure chamber. -2 ~10 - 5 Pa) and high pressure chamber (0.2 ~ 0.4MPa), unable to effectively prevent electrical breakdown and high voltage (20 ~ 130KV) creepage at the same time and ensure the mutual pressure isolation of high vacuum chamber and high pressure chamber at the same time

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