Laser photoacoustic compound detection method for elements and defects and system thereof

Abstract

Belonging to the laser material detection field, the invention discloses a laser photoacoustic compound detection method for elements and defects and a system thereof. A pulsed laser is incident to ananalysis sample to generate plasma and ultrasonic wave for simultaneous analysis of sample elementary composition and structural defects. The detection system comprises the pulsed laser, a spectrum detection unit, an ultrasonic detection unit, a sample stage unit and an analysis control unit. The analysis control unit comprises a digital time delayer and a computer, the digital time delayer is connected to the computer, the sample stage unit includes a 3D displacement platform, the 3D displacement platform s electrically connected to the digital time delayer, pulse laser emitted by the pulsedlaser is incident to a to-be-analyzed sample to produce plasma and ultrasonic wave simultaneously, the ultrasonic detection unit is used for detection of ultrasonic wave, and the spectrum detection unit is used for detection of a visible light spectrum emitted by plasma flame. The method and device provided by the invention can realize detection and analysis of sample elements and defects simultaneously.

Description

technical field [0001] The invention belongs to the field of laser material detection, and specifically relates to a compound detection method and system for element composition and defect distribution excited by laser, which mainly detects and analyzes light and sound signals generated after material excitation by laser to realize target detection. The elements and defects of the material are detected at the same time. Background technique [0002] In the field of material testing, element content and structural defects are two important aspects of material physical and chemical property testing. [0003] In terms of elemental analysis, traditional detection methods include chemical analysis, XRF, ICP-OES, etc. However, these methods have the disadvantages of destroying the sample and taking a long time, and cannot meet the needs of modern element detection such as fast, in-situ, minimally destructive or even non-destructive, so a new spectral detection technology-Laser In...

AI Technical Summary

Problems solved by technology

[0008] In summary, although LIBS technology has superior performance in element detection, LIBS technology has not been applied to detect structural defects of materials at present.

Although laser ultrasonic testing technology has superior performance in non-destructive testing, it cannot detect element distribution

It can be seen that at present, the elements and defects of materials are analyzed separately by a single technical means, which takes a long time for analysis and high detection cost.

[0009] So far, there is no report on simultaneous detection of material elements and defects

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