Reel-to-reel MOCVD equipment capable of performing continuous XRD on-line monitoring
A roll-to-roll and equipment technology, which is applied in the direction of material analysis using radiation diffraction, can solve problems such as wasting time, wasting materials, and wasting processes, and achieve the effect of improving economic benefits, improving yield and production rate
Pending Publication Date: 2018-01-19
上海剑度光电科技有限公司
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Problems solved by technology
[0003] At present, companies that produce high-temperature superconducting strips use sampling methods to test the performance of superconducting materials, that is, the entire strip needs to be produced, removed from the production line, and then some small sec
Method used
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Embodiment
[0025] The stainless steel strip coated with the buffer layer is wound on the unwinding pulley 2 and the take-up pulley 15, and fixed in the unwinding chamber 1 and the take-up chamber 13 respectively.
[0026] The drive motor controls the take-up pulley, adjusts the tape speed (1mm / s-100mm / s), step length (1mm-5m), and pulls the tape into the reaction chamber slowly. After the tape is deposited in the heating zone, it leaves the reaction chamber and enters the quartz inside the tube.
[0027] When the stainless steel strip passes through the sample stage 12, the pressing wheels 18 at both ends will press the strip on the sample stage to prevent it from vibrating.
[0028] The XRD detection system uses 2θ scanning to measure the diffraction peak of the strip (005). The sampling method is continuous sampling. Analysis and cell parameter meter.
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The invention discloses reel-to-reel MOCVD equipment capable of performing continuous XRD on-line monitoring. The reel-to-reel MOCVD equipment capable of performing continuous XRD on-line monitoring consists of a belt retracting and releasing system, an XRD system, a reaction assembly and a driving motor; the belt retracting and releasing system consists of a belt releasing device and a belt retracting device; the belt releasing device consists of a belt releasing chamber and a belt releasing wheel; the belt retracting device consists of a belt retracting chamber and a belt retracting wheel; the belt retracting wheel is connected with a rotating shaft of the driving motor; two ends of a stainless steel belt material are wound on the belt releasing wheel and the belt retracting wheel; the stainless steel belt material on the belt releasing wheel passes through the reaction assembly and the XRD system sequentially and then is connected with the belt retracting device; and the belt retracting and releasing system, the XRD system and the reaction assembly are fixedly connected through connecting parts. Compared with the prior art, the reel-to-reel MOCVD equipment capable of performingcontinuous XRD on-line monitoring can monitor the belt material in situ, avoid damage to the belt material, realize measurement during growth, acquire real-time information feedback of belt material components and structure, facilitate real-time adjustment of the components, facilitate the increase of the qualification rate and the yield of the belt material, and improve the economic benefit.
Description
technical field [0001] The invention relates to the technical field of production and detection of high-temperature superconducting strips, in particular to a roll-to-roll MOCVD equipment capable of continuous XRD on-line monitoring. Background technique [0002] The metal-organic chemical vapor deposition method has the following advantages: easy growth control, high purity, good uniformity over a large area, and large-scale production. The functions of XRD include: phase analysis, precise determination of lattice parameters, orientation analysis, measurement of grain (mosaic) size and microscopic stress, measurement of macroscopic stress, structural analysis, etc. It is a very effective and non-destructive method. Methods of monitoring materials. [0003] At present, companies that produce high-temperature superconducting strips use sampling methods to test the performance of superconducting materials, that is, the entire strip needs to be produced, removed from the produ...
Claims
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Inventor 金成超黄惠良童话俞梦婕
Owner 上海剑度光电科技有限公司
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