Flexible array pressure measurement sensor based on piezoresistive effect and measurement element thereof

Abstract

The invention relates to a flexible array pressure measurement sensor based on piezoresistive effect. The sensor herein includes a row control circuit, a touch element sensing unit, a column control circuit, a same direction amplifier circuit, a filter circuit, a micro-control circuit and a control communication port which are successively connected, and also includes an equipotential shielding circuit. The row control circuit, the equipotential shielding circuit, and the column control circuit are connected to the micro-control circuit. The invention also discloses a measurement method. The method herein includes the following steps: representing the forces at different positions in the touch element sensing unit with variations of different resistances, a measurement point switching circuit selecting to connect different sensitive units to a signal modulation circuit through a row and column simulation circuit, converting the variation of the resistances of the sensitive units to voltages, and obtaining a pressure by calibrating the corresponding relationship between the voltages and voltages. According to the invention, the sensor and the measurement method herein, based on theplan for distributing the sensitive units in rows and columns, can measure the distributed force on the surface with a density of 22 point / cm<2>, and overcome the low density of pressure measurement sensors at home and abroad and too slow detection velocity.

Description

technical field [0001] The invention relates to an array pressure measurement technology based on piezoresistive effect for robot electronic skin. Specifically, it is a measurement system and its measurement method for measuring the plane force distribution, which is mainly used in the fields of robot bionic electronic skin, human-computer interaction and so on. Background technique [0002] Human skin is a very powerful sensor. It can not only measure a variety of physical quantities, such as pressure, temperature, texture, etc., but also simultaneously realize the detection of the intensity and location of the same physical stimulus. Therefore, from the perspective of bionics, the skin-like measurement sensor for the same physical quantity detection should also be able to detect both the intensity of the physical quantity of stimulation and the detection of the location of the stimulus. However, due to the processing technology and sensor interference between detection poi...

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Problems solved by technology

Therefore, from the perspective of bionics, the skin-like measurement sensor for the same physical quantity detection should also be able to detect both the intensity of the physical quantity of stimulation and the detection of the location of the stimulus. However, due to the processing technology and sensor interference between detection points, this type Sensor density and accuracy are severely limited

At present, there are two main categories of such skin-like measurement sensors. The first category is that each measurement sensitive unit is independent of each other, the measurement effect is good, and the interference between each sensitive unit is small, but the main disadvantage is that the distribution density of the sensitive units is small, and the distribution density is generally the highest 4 -7 sensitive units per square centimeter; the other type is the array distribution between sensitive units, leading out the row wires and column wires respectively. Compared with the independent type, the density of this type of sensor can be increased by about 2 times, but due to the introduction of other sensors outside the target sensitive unit Connected back in parallel, the target sensitive unit of the type sensor is susceptible to interference from other sensitive units, so interference suppression and filtering must be performed through an external circuit

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