E-fuse (electrically programmable fuse) structure of semiconductor device

Abstract

The invention provides an E-fuse (electrically programmable fuse) structure of a semiconductor device. The E-fuse structure comprises a control module, a pre-decoder module, word line drive modules, Sax modules and four bit cell arrays, wherein the word line drive modules are arranged on upper and lower sides of the control module and the pre-decoder module; the Sax modules are arranged on left and right sides of the control module and the pre-decoder module; the two word line drive modules and the two Sax modules form a cross-shaped structure; the four bit cell arrays are symmetrically distributed according to the cross-shaped structure. According to the E-fuse structure of the semiconductor device, an E-fuse territory with clear layout, smooth signals and excellent performance is provided, large bit cell arrays are symmetrically distributed vertically and bilaterally, power supply ground buses are distributed on the periphery to form a loop, logic selection circuits are distributed in the loop, signal selection of decoders and symmetry of the arrays are both better improved, and thus, the performance of the E-fuse is improved.

Description

technical field [0001] The invention relates to the field of layout design of CMOS integrated circuits, and in particular to an electrical programming fuse structure of a semiconductor device. Background technique [0002] In the field of integrated circuits, fuses refer to some connection lines formed in integrated circuits that can be blown. Initially, fuses are used to connect redundant circuits in integrated circuits. Once the integrated circuits are found to be defective, the fuses are used to repair or replace the defective circuits. The fuse is generally a laser fuse (Laser Fuse) and an electrically programmable fuse (Electrically Programmable Fuse, hereinafter referred to as E-fuse). With the development of semiconductor technology, E-fuse gradually replaced the laser fuse. [0003] Currently, electrical programming fuse structures (E-fuses) are mostly used in semiconductor devices, and the one-time electrical programming fuses of E-fuse are widely used because of ...

AI Technical Summary

Problems solved by technology

figure 1 The layout of the medium layout is not symmetrical and uniform, the signal selection and direction of the decoder are not clear enough, and the power supply ground cannot be looped to supply internal power, indicating that there is still room for improvement in the performance of this layout.

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