Resonant bionic hair flow velocity and acceleration microsensor with two-stage lever amplification

Abstract

The invention discloses a resonant bionic hair flow velocity and accelerator microsensor based on a two-stage lever amplifying principle. The microsensor comprises an upper-layer hair structure, a middle-layer silicon microsensor structure and a lower-layer glass substrate. Upper-layer hair is directly processed by adopting a micro-processing technique or bonded on the middle-layer silicon microsensor structure by adopting a micro-assembly process, the middle-layer silicon microsensor structure is bonded on the lower-layer glass substrate through an anchor point, and the lower-layer glass substrate is provided a bonding point, an electrode and a signal lead. The middle-layer silicon microsensor structure comprises a two-stage lever force amplifying mechanism; when outside flow velocity oracceleration in the X-axis direction is input, inertia force generated by dragging force or acceleration generated when the outside flow velocity acts on hair is amplified and respectively counteractson two double-end-fixed tuning fork resonator so as to realize signal differential detection; output signals are frequency digital signals, so that digitalization of a circuit is improved. The microsensor is symmetric in structure, high in measuring accuracy and interference resistance and reliable in performance.

Description

technical field [0001] The invention relates to the measurement field of micro-electromechanical systems and micro-inertial devices, in particular to a resonant bionic hair flow velocity and acceleration microsensor with two-stage lever amplification. Background technique [0002] Bionic hair microsensor is a new type of MEMS sensor. By imitating the structure of natural biological hair and the principle of bionics, the hair sensor can realize the detection of various physical quantities such as flow velocity, acceleration, temperature, etc. It is a bionic sensor with great development potential. The hair sensor has a large surface area to volume ratio, which can effectively interact with the external environment; the hair structure and material are easy to modify, and can provide a variety of mechanical properties; in addition, the hair sensor also has small size, high sensitivity, large dynamic range, and anti-interference Ability and other advantages. [0003] In recent...

AI Technical Summary

Problems solved by technology

However, the current hair sensors developed by most organizations are flow rate sensors, which can only measure the flow rate and have a single function. Moreover, the existing flow rate sensors have low measurement accuracy and poor practicability.

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