Single exposure high numerical aperture pulsed laser coherent diffraction imaging device and method of use
A technology of coherent diffraction imaging and high numerical aperture, applied in the field of laser coherent diffraction imaging, can solve problems such as difficulties in three-dimensional imaging, achieve the effects of ensuring luminous flux, improving accuracy, and simplifying the optical path
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Embodiment 1
[0038] This embodiment discloses a single exposure high numerical aperture pulsed laser coherent diffraction imaging device, such as figure 1 mentioned.
[0039] A pulsed laser 1, an attenuator 2, a polarizer 3, a lens 4, a diaphragm 5, a sample stage 6, a reflector group 7, a perforated reflector 8, and a beam collector 9 are arranged coaxially in sequence along the beam advancing direction; Lens 10 liquid nitrogen cooling CCD image sensor 11 is provided with lens 10 liquid nitrogen cooling CCD image sensor 11 successively in the reflected beam advancing direction of mirror group 7; The CCD image sensors 12 are all connected to a computer 13 .
[0040]Wherein, the reflective mirror group 7 and the perforated reflector 8 are all arranged on the step frame capable of moving left and right, up and down, and forward and backward; On the optical bench, two CCDs are respectively fixed on two stepping frames that are perpendicular to each other and can move left and right and up a...
Embodiment 2
[0045] According to the device in Embodiment 1, this embodiment provides a method for using the device.
[0046] A method for using a single exposure high numerical aperture pulsed laser coherent diffraction imaging device, the steps are:
[0047] Step 1: Turn on the pulsed laser, use the CCD to collect signals, and adjust the position of each device in the optical path so that the pulsed laser passes through the optical path;
[0048] Specifically, adjust the direction of the polarizer 3 so that the laser polarization plane is in the vertical direction; adjust the distance between the four plane mirrors in the mirror group 7, and adjust the mirror group 7 in the vertical direction of the optical path to allow the direct pulsed laser to pass; the vertical direction of the optical path Adjust the mirror 8 with a hole to make the pulsed laser pass through the circular hole; adjust the beam collector vertically to the direction of the optical path so that the pulsed laser enters ...
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