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Flexible electronic skin sensor and manufacturing method thereof

An electronic skin and sensor technology, applied in the preparation of microspheres, instruments, microcapsule preparations, etc., can solve the problems of limited detection ability and low sensitivity of flexible tactile sensors, and achieve the effect of good sensing performance

Active Publication Date: 2018-03-09
深圳远芯光路科技有限公司
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Problems solved by technology

[0005] In order to solve the above-mentioned problems in the prior art, the present invention provides a flexible electronic skin sensor and its preparation method to solve the problems of low sensitivity and limited detection ability of the existing flexible tactile sensor

Method used

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  • Flexible electronic skin sensor and manufacturing method thereof
  • Flexible electronic skin sensor and manufacturing method thereof

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preparation example Construction

[0032] figure 2 The method flowchart of an example provided for the preparation method of the flexible electronic skin sensor of the present invention, such as figure 2 Shown, the preparation method of flexible electronic skin sensor comprises the following steps:

[0033] Step S1, preparing polyaniline hollow nanospheres 31;

[0034] Step S2, mixing and dispersing polyaniline hollow nanospheres 31 and multi-walled carbon nanotubes 32 in a preset mass ratio into a dimethylformamide solution to obtain a first mixture, drying and removing the first mixture in step S2 The dimethylformamide in obtains the second mixture, spin coats the second mixture to form the composite pressure sensing membrane 3;

[0035] Step S3, sandwiching the composite pressure sensing film 3 between the two electrodes 2 to assemble a pressure sensing unit;

[0036] Step S4, using a plasma processor to process several pressure sensing units produced in step S3, and using electrode pixels to form a sen...

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Abstract

The invention provides a flexible electronic skin sensor and a manufacturing method thereof. The flexible electronic skin sensor comprises a plurality of pressure sensing units, wherein each pressuresensing unit comprises two flexible telescopic ultrathin PDMS (Polydimethylsiloxane) films, two electrodes which are correspondingly adhered between the two ultrathin PDMS films, and a complex pressure sensing film which is arranged between the two electrodes; the complex pressure sensing film comprises a plurality of polyaniline hollow nanoparticles, and multi-wall carbon nanotubes for connectingadjacent polyaniline hollow nanoparticles; each pressure sensing unit uses a plasma treatment machine and carries out electrode pixel treatment to form a sensor array with a set area. According to the flexible electronic skin sensor, the complex pressure sensing film which is of a hollow structure is adopted and is outstanding in elasticity and ultralow in elastic modulus, so that various outsidestimuluses can be effectively amplified and transformed through the pressure sensing units; the pressure sensing capacity is high; and the temperature resolution is high; in addition, a single pressure sensor can be easily integrated into the sensor array, thus achieving excellent sensing performance.

Description

technical field [0001] The invention relates to the technical field of skin tactile sensors, in particular to a flexible electronic skin sensor and a preparation method thereof. Background technique [0002] Touch is an important sensory function when people are in direct contact with the external environment. Flexible tactile sensors are the key technology to realize electronic skin technology. Its purpose is to simulate human perception ability and has excellent development prospects. [0003] At present, with the development of microelectronics technology and the emergence of various organic materials, a variety of flexible tactile sensor development schemes have been proposed, but most of them belong to the laboratory stage, and few have reached commercialization. Moreover, although the materials used in some flexible tactile sensors that have reached productization can withstand high stress, their sensitivity is low and their detection capabilities are limited, so they ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08G73/02B01J13/14C08J7/14C08J9/26C08J5/18G01L5/00C08L25/06C08L79/02
CPCB01J13/14C08G73/02C08J5/18C08J7/14C08J9/26C08J2325/06C08J2327/16C08J2379/02C08J2425/06C08J2427/16C08J2479/02G01L5/00
Inventor 朱玲房菲儿张静王威
Owner 深圳远芯光路科技有限公司
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