Optical coating device base plate bearing mechanism
A technology of optical coating and carrying mechanism, applied in gaseous chemical plating, sputtering plating, ion implantation plating, etc., can solve the problems of slow cooling speed, low production efficiency, easy to burn workers, etc., and reduce the cooling time , Reduce manual labor and speed up production
Inactive Publication Date: 2018-03-13
ZHONGSHAN CHUANGKE RES TECH SERVICE
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Problems solved by technology
The existing substrate carrying mechanism requires labor to replace the substrate carrier, and the cooling speed is slow, the production efficiency is low and workers are easily burned
Method used
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[0020] Below in conjunction with accompanying drawing, invention will be further described:
[0021] Such as Figure 1-Figure 3 As shown, a substrate carrying mechanism of an optical coating device includes a first power supply 31, a sealing gasket 18, a second power supply 36, a bearing with a seat 7, and a base plate 1. A support block 2 is provided at one end of the base plate 1 to support the first motor. 3, the support block 2 is provided with a first motor 3, which provides the power for the rotation of the rotating frame 8, and the first motor 3 is provided with a first output shaft 5, which acts as a connection, and the first output shaft 5 passes through close to the first motor The vertical plate 10 of 3 is connected to the rotating frame 8, and the rotating frame 8 is provided with a connecting shaft 30 to place a substrate carrier 19. The connecting shaft 30 is provided with a substrate carrier 19 to carry the substrate, and the connecting shaft 30 is provided with...
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Abstract
The invention discloses an optical coating device base plate bearing mechanism comprising a first power source, a seal pad, a second power source, a seat-mounted bearing and a bottom plate. A supportblock is arranged at one end of the bottom plate and is provided with a first motor. The first motor is provided with a first output shaft. The first output shaft penetrates through a vertical plate close to the first motor to be connected with a rotary frame. The rotary frame is provided with a connecting shaft provided with a base plate bearing frame. A cavity is formed in the connecting shaft.The base plate bearing frame is provided with a base plate fixing position and is internally provided with an installing hole and an armature. A cooling mechanism is arranged below the first motor. The optical coating device base plate bearing mechanism has the beneficial effects that the base plate bearing frame can be replaced automatically, manual labor is relieved, production cost is reduced,the coated base plate bearing frame can be cooled, cooling time is reduced, production is quickened, and high-temperature scalds of workers are prevented.
Description
technical field [0001] The invention relates to the field of optical coating, in particular to a substrate carrying mechanism of an optical coating device. Background technique [0002] Coating is to coat a layer of transparent electrolyte film or metal film on the surface of the material by physical or chemical methods, in order to change the reflection and transmission characteristics of the surface of the material. In the visible and infrared range, the reflectivity of most metals can reach 78% to 98%, but not higher than 98%. Whether it is for CO2 laser, copper, molybdenum, silicon, germanium, etc. are used to make mirrors, germanium, gallium arsenide, zinc selenide are used as output window and transmission optical element materials, or ordinary optical glass is used as mirror for YAG laser , the output mirror and the transmission optical element material cannot meet the requirements of more than 99% of the total reflection mirror. The output mirror has different tran...
Claims
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IPC IPC(8): C23C14/50C23C16/458
CPCC23C14/505C23C16/4581
Inventor 秦文锋杜瑞婷黄兰英杨永华
Owner ZHONGSHAN CHUANGKE RES TECH SERVICE