Manufacturing tooling for cascaded film-substrate bonding body and optical device manufacturing method
A technology for film optics and production methods, which is applied in chemical instruments and methods, optical components, lamination devices, etc., can solve the problems of poor uniformity of the adhesive layer and low angular precision of the cascaded films, and achieve high uniformity of the adhesive layer and improved Light energy utilization, small wavefront distortion
Active Publication Date: 2020-05-08
BEIJING LLVISION TECH CO LTD
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Problems solved by technology
[0003] In order to solve the problems of low angular accuracy and poor uniformity of the adhesive layer of the cascaded thin film caused by the above-mentioned existing method for manufacturing cascaded thin film optical devices, the present invention proposes a cascaded thin film substrate bonding body production tooling, and Optical device fabrication method
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[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.
[0036] figure 1 Schematic diagram of the structure of the tooling for the cascaded film-substrate bonded body of the embodiment of the present invention, as shown in figure 1 As shown, the cascaded thin film substrate bonded body manufacturing tooling according to the embodiment of the present invention is used to make a cascaded thin film substrate bonded body, and the cascaded thin film substrate bonded body is used to make cascaded thin film optical devices, including: Too...
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The invention provides a cascaded thin film substrate bonded body manufacturing tool and an optical device manufacturing method. The cascaded thin film substrate bonded body manufacturing tool includes a tool main body and a pressure adjustment mechanism; the tool main body is used for bearing a plurality of stacked cascaded thin film substrates, and an adhesive is coated between the adjacent cascaded thin film substrates; and the pressure adjustment mechanism is used for adjusting the pressure distribution among the plurality of stacked cascaded thin film substrates and pressing the uniformly-pressure-distributed stacked substrates into a cascaded thin film substrate bonded body. A cascaded thin film optical device processed in the invention has a small wavefront distortion, is suitable for various high-precision optical systems, such as communication and measurement, improves the energy threshold of transmitted light beams, reduces the possibility of bursting in high-energy laser application, also greatly improves the angle precision of the beam combing and splitting system of the cascaded thin film optical device, and improves the utilization rate of light energy.
Description
technical field [0001] The invention relates to the field of cascaded thin film optical devices, in particular to a manufacturing tool for a cascaded thin film substrate bonded body and a method for manufacturing an optical device. Background technique [0002] Cascaded thin-film optical devices are composed of multiple layers of thin films with different characteristics, which can realize beam splitting and beam combining functions of different wavelengths, different polarization states, and different energy ratios. They are increasingly used in modern optoelectronic systems such as projection displays and lasers. middle. However, due to its complex structure and cumbersome processing technology, and the cascaded films produced by the existing methods for making cascaded films are difficult to meet the requirements, there are deficiencies such as low angle accuracy of the cascaded films and poor uniformity of the adhesive layer, which makes beam splitting , Poor beam combi...
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IPC IPC(8): B32B37/10B32B37/12B32B38/00B32B38/04B32B38/16
CPCB32B37/10B32B37/1284B32B38/0012B32B38/04B32B38/162B32B2038/0016B32B2038/045B32B2551/00
Inventor 李勇吴斐郑臻荣
Owner BEIJING LLVISION TECH CO LTD