176 results about "High energy laser" patented technology

The invention relates to the field of optical elements, in particular to a coating method of a high-precision intense laser optical lens. The film coating method comprises the following steps: step 1, substrate pretreatment; step 2, surface activation; 3, a preparation stage; step 4, coating treatment; and step 5, post-processing. According to the method disclosed by the invention, the problems of adhesive force, uniformity, damage resistance and the like of a traditional method in strong laser lens coating are solved through fusion of double-plasma cooperation and a self-adaptive gradient composite coating technology. The method provided by the invention can be used for customized production for different laser scenes, and is suitable for high-end fields such as high-energy laser industry, quantum calculation, infrared imaging and the like.

The invention discloses a heat-resistant aluminum-based composite material and a selective laser melting forming preparation method and application thereof, and belongs to the technical field of metal material additive manufacturing. According to the method, aluminum-silicon alloy matrix powder and nano CuO powder are mixed to serve as cladding powder, Al2O3 and Al2Cu nano particles and precipitated phases which are evenly distributed are directly generated in matrix alloy through in-situ reaction of Al-CuO in a selective laser melting process under the action of high-energy laser, and an aluminum-silicon eutectic structure can be refined to 200-300 nm. Cooperative strengthening of multiple precipitated phases and multiple interfaces is achieved, and the problems of coarse precipitated phases, unmelted particles and the like generated by traditional alloying methods and the like are solved. According to the method, the high-temperature mechanical property of the selective laser melting forming aluminum-based composite material can be remarkably improved. The prepared composite material is suitable for high-temperature light-weight components such as aerospace and nuclear energy equipment, and has a wide application prospect.

The invention discloses a welding robot with a protection function, the welding robot comprises a rack, a laser welding head is movably arranged on the rack, a bearing plate is arranged on the rack, two to-be-welded plates are placed on the bearing plate, the welding robot further comprises a pressing assembly and a protection assembly, the pressing assembly is arranged on the bearing plate, and the pressing assembly is used for fixing the two to-be-welded plates; the silica gel adhesive tape is connected with the two plates to be welded; the aluminum foil is arranged on the silica gel adhesive tape; the ceramic gasket is arranged on the aluminum foil; and the high-temperature-resistant surface layer is arranged on the ceramic liner. In the welding process, the aluminum foil, the ceramic gasket and the high-temperature-resistant surface layer are connected to a welding seam between the two plates to be welded through the silica gel adhesive tape. In the laser welding process through the laser welding head, the high-temperature-resistant surface layer can directly resist high-temperature corrosion generated by a molten pool and high-energy laser of the laser welding head, the burning through phenomenon is avoided, and effective protection is provided for welding of two plates to be welded.

The invention provides a performance prediction and control method for a multi-physics-field coupled high-energy laser system, and relates to the technical field of laser systems, and the method comprises the steps: obtaining optimized environment parameters; configuring laser system parameters; determining turbulence compensation parameters and laser energy distribution data; determining turbulence compensation control parameters at the current moment; controlling a deformable mirror of the high-energy laser system based on the turbulence compensation control parameters; determining optical element temperature field data, optical element deformation and wave aberration variation based on the laser system parameters and the laser energy distribution data; determining task feasibility of the current task based on the optical element temperature field data; under the condition that the task feasibility is feasible, determining a target dynamic damage threshold; and determining a performance prediction result of the high-energy laser system. According to the technical scheme, control and performance prediction are carried out on the high-energy laser system based on multi-parameter cooperation in the coupled physical field, the environmental adaptability and the parameter configuration efficiency are improved, and closed-loop compensation can be carried out in real time.

The invention discloses a method for strengthening a nanocrystalline material through laser shock, belongs to the field of metal material laser shock processing, and aims at solving the problem that the application field of an existing nanocrystalline material is limited due to the fact that the mechanical property of the existing nanocrystalline material is poor. Laser pulses penetrate through the restraint layer transparent material to directly reach the ablation layer, the ablation layer instantaneously absorbs high-energy-density pulse lasers and instantaneously vaporizes and ionizes the high-energy-density pulse lasers to form high-energy shock waves, the peak pressure of the shock waves is instantaneously increased under the limitation of the restraint layer and can reach the GPa level, a large number of defects are introduced into the nanocrystalline foil, and therefore the high-energy-density nanocrystalline foil is obtained. Therefore, the nanocrystalline material is strengthened. The method is mainly used for surface strengthening of nanocrystalline materials.

The invention discloses a method for identifying a bad plate in a substrate, belongs to the technical field, and realizes high fusion of bad plate identification and a production process through a precise marking process and a dynamic data collaboration mechanism. A high-energy laser carbonization technology is adopted, an irreversible permanent mark is formed on the surface of a substrate, and a microscopic carbonized layer structure and a base material form remarkable optical contrast. The mark can still keep stable gray scale characteristics under strong light irradiation, and the problem of misrecognition caused by the fact that a traditional ink mark is prone to falling off and pollution is solved. Meanwhile, the closed-loop control of laser parameters ensures that the marking area is only modified within the depth of 0.1 mm of the surface layer, substrate warping or inner layer circuit damage caused by diffusion of a heat affected zone is avoided, and the reliability and safety of marking of the damaged plate are guaranteed from the physical level.

The invention belongs to the technical field of catalytic materials, and particularly relates to a preparation method and application of an iridium-based nano high-entropy alloy for an OER electrocatalyst. Five metal elements of iridium (Ir), ruthenium (Ru), iron (Fe), nickel (Ni) and tin (Sn) are mixed to serve as a parent material, and the parent material is mixed with an organic solvent aqueous solution which is specifically prepared to form powder turbid liquid or the parent material and the organic solvent aqueous solution are evenly mixed and pressed into a metal target material. And then the micro-nano powder or the metal target material in the turbid liquid is subjected to laser ablation treatment through a temperature field modulated laser liquid phase corrosion method, nano-particles are formed under the action of high-energy laser, and finally the iridium-based nano high-entropy alloy is prepared. The prepared iridium-based nano high-entropy alloy has excellent catalytic performance in the field of OER.

The invention provides a high-energy laser damaged material surface temperature monitoring system and method.The high-energy laser damaged material surface temperature monitoring system comprises a high-energy laser light source, a homogenizing optical fiber beam expanding system, a material sample fixing system and a material surface temperature monitoring system, and laser generated by the high-energy laser light source is output after being homogenized and expanded by the homogenizing optical fiber beam expanding system; the output homogenized high-energy laser acts on an irradiation target material sample after beam expansion, the material surface temperature monitoring system comprises a high-precision target acquisition system, a binocular vision imaging system and a multispectral wavelength temperature measurement system, and the target acquisition system is used for acquiring infrared heat radiation on the surface of a laser irradiation material; the binocular vision imaging system is used for realizing three-dimensional thermal imaging of the laser irradiation target material sample piece according to the collected infrared thermal radiation, and the multispectral wavelength temperature measurement system is used for realizing three-dimensional temperature measurement of the laser irradiation target material sample piece according to the three-dimensional thermal imaging. By applying the technical scheme of the invention, the technical problem that three-dimensional temperature monitoring is difficult to realize in the prior art is solved.

The invention provides metal sheet machining equipment based on a high-energy laser beam, and relates to the technical field of metal sheet machining. Sawtooth battens are arranged on the top of the machining platform in an arrayed mode, and the top of the machining platform is connected with a movable scraping piece. A screw is connected into the machining platform, a hand wheel is arranged at the end of the screw, and the screw is connected with a movable scraping piece. A supporting rail base is fixedly installed at the top of the machining platform, two movable sliding bases are connected to the top of the supporting rail base, and electromagnets are embedded in the tops of the movable sliding bases. The distance between the two electromagnets can be changed according to different specifications of metal sheets needing to be machined, the metal sheets are magnetically attracted and fixed, and the stability of the metal sheets in the laser cutting state is guaranteed. The problems that in the process of machining a metal sheet through a high-energy laser beam at present, a movable clamping block is generally adopted for clamping and limiting the edge of the metal sheet, the metal sheet is extremely prone to slight deformation, and the machining precision is affected are solved.

The invention discloses an airport intelligent laser bird repelling system and method based on multi-sensor fusion, and relates to the technical field of airport safety protection, and the system comprises a flying bird coarse positioning module, a flying bird fine tracking module, a flying bird laser repelling module and a remote monitoring module. The flying bird coarse positioning module adopts a phased array millimeter wave radar to carry out wide area scanning on a designated area of an airport, and outputs coarse positioning coordinates of a flying bird. Then, the bird fine tracking module uses a laser scanning radar and a medium-wave infrared camera to cooperatively carry out high-precision tracking scanning on the bird in the target area, and outputs the three-dimensional coordinate of the bird in real time. The remote monitoring module displays an airport area map and a bird infrared image on an indoor console in real time, and provides a manual control interface for an operator at the same time. And finally, the bird laser repelling module controls a high-energy laser transmitter of the bird repelling machine to output a high-energy pulse laser beam to a bird body according to the three-dimensional coordinates of the bird, and the bird in the target area is accurately repelled.

The invention provides a forming method for a curved frame component of an aircraft made of a thermoplastic composite material, which comprises the following steps: S1, based on a mathematical model of the curved frame component, laying the thermoplastic composite material through an automatic fiber laying process to form a preformed body flat plate; s2, the preformed body flat plate is cut to the preformed body size required by mold pressing along the laid positioning tows; and S3, the preformed body flat plate is subjected to mold pressing through a hot mold pressing process to form the curved frame component in a preset shape. According to the scheme, the thermoplastic composite material preform flat plate is prepared by adopting an automatic fiber placement process, so that automatic and accurate positioning of fibers can be realized, and interlayer bonding stability can be realized through high-energy laser heating. In addition, the material sheets can be accurately positioned through the hot mold pressing process, and therefore rapid mold pressing forming of parts with complex characteristics is achieved.

The invention provides a puncture guide wire with foresight detection and penetration functions and an intelligent intervention system, and belongs to the technical field of medical minimally invasive intervention instruments. The energy conversion assembly is innovatively integrated at the head end of the puncture guide wire, and the dual functions of A-type ultrasonic foresight detection and ablation are achieved through electric or optical path driving. The system supports two implementation modes: in an electroacoustic mode, a piezoelectric micro-electro-mechanical system is used for realizing ultrasonic transceiving and ablation; in the opto-acoustic mode, ultrasonic waves are generated by utilizing the opto-acoustic effect of the optical fiber, echoes are detected by utilizing optical interference, and ablation is performed by utilizing high-energy laser or ultrasonic waves. According to the invention, blood vessel, heart and occlusion lesions are identified based on a waveform fingerprint algorithm of time domain echoes, and a high-energy mode can be dynamically switched to assist in penetrating tissues. The problems that in an existing minimally invasive interventional operation, in-vitro image guiding precision is insufficient, a traditional IVUS / ICE catheter is too large in size and high in cost, and a traditional guide wire lacks active detection and auxiliary penetrating capacity when facing complex lesions are solved.

The invention discloses a multipurpose high-energy laser cutting module and an assembling method, and relates to the technical field of laser cutting. The fixed frame is fixedly arranged at the bottom of the driving frame, a movable block slidably penetrates through the lower side of the fixed frame, and the laser head is arranged on the lower side of the movable block; the adjusting driving assembly is arranged in the fixing frame; the multiple fixing tables are distributed and fixedly arranged on the upper side of the machining table at equal intervals. Machining platforms are arranged on the upper side of the fixed table, and the upper surfaces of the multiple machining platforms are flush with one another; the three movable adjusting assemblies are arranged in the corresponding fixing tables respectively. The laser depth is adjusted by driving the laser head, and the height of a workpiece is changed by driving the machining platform to move, so that the device is used for metal plates with different thicknesses, the calibration operation intensity is reduced, and the machining efficiency is improved.

The invention discloses a portable quick-release split high-energy laser sniper rifle, and relates to the field of directional energy laser weapons, the portable quick-release split high-energy laser sniper rifle comprises a high-energy laser backpack and a laser sniper rifle, the laser sniper rifle is connected with the high-energy laser backpack through a photoelectric cable, and the laser sniper rifle comprises a rifle body, a sighting telescope and an optical lens. The sighting telescope is installed at the top of the gun body through a first Picatini guide rail, the optical lens is installed at the front end of the gun body, the gun body comprises an upper casing and a lower casing, the bottom of the upper casing is hinged to the lower casing, an inner cavity is formed between the upper casing and the lower casing, a QBH installation base is installed in the inner cavity, the QBH installation base and the optical lens are coaxially arranged, and the optical lens is installed on the QBH installation base. A QBH connector is connected to one end of the photoelectric cable, the QBH connector is rotationally connected to the QBH mounting base, the upper casing deflects downwards to be separated from the lower casing and is used for opening the inner cavity, and compared with a traditional sniper rifle of an integrated structure, the sniper rifle can remarkably save time and labor cost and improve the use flexibility of weapons when rapid deployment, position transfer or maintenance are needed.

The invention discloses a local area wireless laser communication-distance measurement-energy transmission integrated terminal of a space on-orbit service platform, and belongs to the technical field of optical electromechanical system integration and precision measurement. The terminal integrates three functions of high-speed data communication, high-precision laser ranging and efficient wireless energy transmission. The core innovation lies in that unified optical aperture sharing for transmitting high-energy laser beams and receiving weak signals is realized through a beam splitter and an optical path multiplexing architecture, and the size and weight of the system are remarkably reduced while signal isolation is ensured. The terminal measures the laser round-trip time in real time in the communication process by using the high-stability clock reference of the precise timing unit, directly calculates the relative displacement between the nodes, and can realize the non-contact high-precision deformation sensing of the platform structure. Besides, the system supports intelligent switching between a communication / ranging low-power mode and an energy transfer high-power mode, dynamic flexible allocation of on-orbit energy is realized, and high-precision, high-reliability and high-autonomy task requirements of space services are met.

The present invention relates to the field of high-energy laser counter-UAVs. The present invention provides a method and system for collecting and analyzing UAV damage effectiveness data. The method comprises: obtaining UAV damage effectiveness data using a video data acquisition device and a temperature data acquisition device; wherein the video data acquisition device and the temperature data acquisition device are carried into the air by a UAV; and calculating the acquired UAV damage effectiveness data. The UAV damage effectiveness data calculation process includes image-based energy effectiveness calculation and temperature measurement-based effectiveness calculation; confidence weights are preset for the image-based energy effectiveness calculation and the temperature measurement-based effectiveness calculation; and a total estimated value of the UAV damage effectiveness data is calculated using the preset confidence weights. The present invention has the characteristics of low cost, good practicality, excellent timeliness, robustness, and strong scalability.

The invention belongs to the technical field of high-energy laser, and discloses a packaging device for laser accessory production, which comprises a connecting shaft, a mounting block is fixedly mounted at the bottom of the connecting shaft, a guide sleeve fixedly sleeves the bottom of the mounting block, and a telescopic rod fixedly sleeves the middle of the guide sleeve. And pressure regulating mechanisms are fixedly mounted at the two telescopic ends of the telescopic rod. Under the condition that the clamping plate and the accessory plate do not slide relative to each other, the clamping plate drives the accessory plate to move downwards to cross the buckle of the mounting bracket and the area where the friction force between the accessory plate and the mounting bracket is large, so that the upper surface and the lower surface of the accessory plate are not touched, and the accessory plate is fixed according to the resistance between the accessory plate and the mounting bracket. The clamping force between the accessory plate and the clamping plate is adjusted, and the problem that the accessory plate is bent, deformed and broken due to the fact that an existing clamping device keeps the maximum extrusion force with the accessory plate for a long time is solved.

The invention discloses a high-energy laser electrified deicing method and system for a post insulator of a transformer substation based on material classification, and the method comprises the steps: classifying the post insulator of the transformer substation according to materials, and adjusting the parameters of a high-energy laser according to the number threshold values of photons in unit area corresponding to different materials; safe and efficient electrified deicing of the post insulator of the transformer substation is realized, and damage to an insulator material caused by improper laser energy is avoided.

The invention belongs to the technical field of laser welding methods, and particularly relates to a plastic laser welding method. The plastic laser welding method comprises the following steps that S1, high-energy laser is used for etching the first welding surface of a first plastic part, so that a plurality of micro grooves are formed in the first welding surface; s2, the first welding surface of the first plastic part is attached to the second welding surface of a second plastic part, and the first welding surface and the second welding surface which are attached are welded through infrared laser, so that the first plastic part and the second plastic part are welded into a whole; wherein the first plastic part and the second plastic part are plastic parts of the same kind or different kinds. According to the plastic welding method, the welding quality of the plastic part can be improved, and the welding efficiency can be improved.

The present application provides a laser deposition repair layer on the surface of a titanium alloy and a repair method. In this method, high-purity Fe, Co, Cr, C, and B powders are used as deposition materials, and a TiB2 ceramic phase is in-situ deposited on the surface of the titanium alloy substrate under the irradiation of high-energy laser. This greatly improves the hardness and wear resistance of the deposition repair layer, and further enhances the ability of the deposition repair layer to withstand alternating loads during the wear process, avoiding the generation of cracks in the deposition repair layer. In addition, the deposition repair layer and the titanium alloy substrate have good metallurgical bonding, greatly improving the service life of the repair layer, and are suitable for repairing the service damage of Ti-6Al-4V titanium alloy. The Ti element in the deposition repair layer comes from the titanium alloy bulk material, and there is no need to add Ti powder to the deposition powder; the mixed powder is an iron-based powder with a low price, which all reduces the repair cost of the titanium alloy. This method is simple to operate, and the formed quality of the deposition repair layer is good, which is suitable for mass production.

The invention provides a crystallization method of an amorphous nano-film, which comprises the following steps of: depositing the amorphous nano-film in a reaction cavity by adopting an atomic layer deposition method, performing high-energy laser annealing treatment on the surface of the amorphous nano-film, and converting the amorphous state in the amorphous nano-film into a crystalline state to prepare a crystalline nano-film. According to the method disclosed by the invention, controllable preparation of a crystalline functional film is realized by introducing laser annealing treatment after ALD deposition, a crystallization method of the amorphous nano film is constructed, the problems of poor crystallinity and limited performance after ALD film formation can be effectively solved, and a reliable, efficient and controllable film preparation scheme is provided for a next-generation high-performance device.

An arrayed high-energy laser counter-UAV (unmanned aerial vehicle) test method and apparatus are provided, relating to the technical field of UAV tests. The method includes the following steps: preparing a test apparatus and a UAV; conducting a laser counter-UAV test; observing an ablation process and analyzing an ablated morphology of the UAV to obtain a radius and ablation depth of a tested ablation area of the UAV; performing finite element simulation on a test process to obtain a radius and ablation depth of a simulated ablation area of the UAV; and comparing the radii and ablation depths of the simulated and tested ablation areas of the UAV, adjusting finite element simulation parameters to make a simulation result coincide with a test result, and deriving an ablation depth-time variation curve of a key point in the simulated ablation area.

The utility model discloses a laser obstacle removing device, which relates to the technical field of laser equipment, and comprises an optical ranging aiming lens, a laser emission lens, an electric holder and a control panel, and the optical ranging aiming lens and the electric holder are respectively arranged at the top and the bottom of the laser emission lens. The optical ranging aiming lens is used for measuring the distance between the laser obstacle removing device and a target, a distance signal is used as a focusing parameter to guide the laser emitting lens to focus, the optical ranging aiming lens transmits a target image back to the control panel, and the laser emitting lens is used for bearing input and output of high-energy laser. The focus of a laser beam is adjusted through a distance signal of an optical ranging aiming lens, the electric holder has the rotating freedom degree in the horizontal direction and the vertical direction, the functions of system rotation, aiming, laser focusing and emitting and the like are achieved through a control panel, and the problems that a laser obstacle removing device is complex in structure, not attractive in appearance, incomplete in function and high in practicability are solved. And the operation is troublesome.

The invention discloses an on-line measuring device and method for a high-energy broadband pulse laser light field and a far-field focal spot. Broadband pulse laser generated by a high-energy laser device is processed by an intensity attenuation system and then reaches a light splitting element; the light beam penetrating through the spectroscope penetrates through a coding plate, the coding plate is used for carrying out coding modulation on the light beam, and then a table array light intensity detector is used for recording the intensity of a single-frame diffraction image formed after modulation of the coding plate; and the spectral data of the light beam reflected by the light splitting element is recorded by a spectral analysis unit. The near-field complex amplitude (intensity and phase) distribution of a to-be-measured high-energy broadband pulse laser light field can be accurately reconstructed through a multi-mode light field reconstruction algorithm by means of single-frame diffraction image intensity recorded on line by an area array light intensity detector and single-time spectrum data recorded on line by a spectrum analysis unit, and meanwhile far-field focal spot distribution can be obtained through inversion. The method has the advantages of simple structure, low cost, strong environment anti-interference capability and the like.

The invention relates to the technical field of cooling of optical equipment in a high-energy laser system, in particular to a water-cooling optical mirror bracket, which is characterized in that an annular or spiral annular water channel matched with the circumferential heat dissipation characteristic of a lens is arranged in a mirror bracket body, and two ends of the water channel are communicated with the outside through connecting ports in the side wall of the mirror bracket. Coolant flows through the water channel to efficiently take away heat. The design does not need an additional water cooling plate, reduces the weight of the mirror bracket, saves the optical space, can be compatible with various coolants such as liquid and gas, is adaptive to the temperature range from the liquid nitrogen temperature to 600 DEG C and the pressure environment from low vacuum to 10 atmospheric pressures, and can be made of alloys such as aluminum, steel and copper. The machining modes comprise 3D printing, casting, friction welding and the like, and the method is suitable for spectacle frames with different thicknesses. The design is uniform in cooling, can guarantee the optical property of the lens and stable light spot quality, and is wide in application range.

The invention relates to the technical field of optical glass of a high-energy laser system, in particular to a preparation method of insensitive silicon dioxide optical glass of the high-energy laser system, the glass contains a mesostructure and is formed by curing nano silicon dioxide particles, the silicon dioxide particles are all integrated on the optical layer, and the optical glass is formed by curing the nano silicon dioxide particles. The mechanical layer is of a porous network and compact area composite structure; a mesostructure endows the silicon dioxide glass with the insensitive characteristic, namely, the silicon dioxide glass has the advantages of high laser damage growth threshold, slow laser damage growth, insensitivity to the environment, high laser load and long service life in a high-energy laser system. The purity of the insensitive silica glass is improved, the mesostructure of the insensitive silica glass with long service life and high damage value-added threshold is optimized, meanwhile, the novel insensitive optical glass is created by taking silica as a base material and fusing a preparation method, and the processing quality is improved.

The application discloses a kind of middle-long wave infrared shallow slot deep broadband all-dielectric reflection grating and preparation method thereof, belong to the technical field of infrared optical device.The grating is composed of bottom grating film and top shallow slot deep diffraction grating, bottom grating film and top shallow slot deep diffraction grating cooperate and modulate Bloch mode reflection phase, and the diffraction efficiency of-1 level is higher than 99% in 3-14 μm wave band range.Preparation method includes: sequentially depositing functional film layer on substrate, and forming shallow slot deep grating structure by patterning etching.The application adopts the design of all-dielectric shallow slot deep grating, avoids the preparation difficulty of middle-long wave infrared diffraction grating, and has the performance of wide angular spectrum, ultra-wide band, high diffraction efficiency and high damage threshold.The application provides a solution to the preparation condition limitation of middle-long wave diffraction grating, accelerates the application of diffraction grating in middle-long wave infrared, and promotes the development of middle-long wave infrared high-energy laser spectrum beam combination system, ultra-short laser pulse compression and spectrometer system.

The invention relates to a follow-up regulation and control method for unequal-intensity laser shock peening intensity of a liquid restraint layer, and belongs to the technical field of high-energy laser material surface engineering. The method comprises the following steps: (1) constructing a thickness-strength mapping model; (2) building a constraint type laser shock surface strengthening device, and setting a moving path of a laser beam in a to-be-processed area; (3) processing the surface of the to-be-processed material, and placing a photosensitive element on the surface of the material; and (4) state changes of different to-be-machined positions are tested in real time, and the constraint type laser shock surface strengthening device is adjusted until machining is completed. Based on real-time monitoring of the light refractive index, change data of the thickness of the deionized water restraint layer is tested and obtained, indexes such as the thickness of the deionized water restraint layer or laser energy needing to be adjusted are calculated and fed back, and unequal-intensity laser shock surface strengthening is achieved.

The invention provides a direct bonding method based on laser surface activation and repair. The direct bonding method comprises the steps of wafer cleaning, high-energy laser processing, low-energy laser processing and wafer bonding. According to the method, atoms on a wafer bonding interface are activated by using high-energy laser, diffusion of the atoms is promoted, surface dangling bonds are opened, and favorable conditions are created for the subsequent bonding process. Then, a low-energy laser is used to repair an amorphized or lattice damaged layer of the bonding interface. The invention provides a bonding method which can be carried out at room temperature and can realize lattice repair while activating. According to the method, additional annealing treatment is not needed, laser treatment only acts on the surface of the wafer, meanwhile, the specific rapid temperature rising and falling characteristic of laser processing is fully utilized, the influence on the wafer is strictly limited to the extremely shallow surface layer of the wafer, the overall thermal budget is reduced, meanwhile, thermal damage to the wafer body is avoided, and the wafer quality is improved. The method is especially suitable for high-quality bonding preparation of heat-sensitive devices. Besides, the method has excellent compatibility, and can be combined with the prior art of plasma activation, surface activation bonding and the like to improve the flexibility of the bonding process and the product quality.

The application provides a deep ultraviolet double-waveband femtosecond laser processing objective lens, relates to the optical technology field, and the processing objective lens comprises a first lens group, a second lens group, a diaphragm and a third lens group. The femtosecond laser emitted by a laser light source passes through a collimation and beam expansion optical system composed of various lens groups, is converged on an image plane through the objective lens, the processing of the femtosecond laser is realized, higher processing precision is realized by adopting a shorter deep ultraviolet wavelength, steep and burr-free processing boundaries are obtained, the working distance of the objective lens is greater than 11 mm, the adhesion of material chips in the laser processing process can be effectively reduced, the service life of the objective lens is increased, the damage of high-energy laser to the objective lens is avoided, and the technical problem that the existing processing system is difficult to obtain higher processing precision by using a shorter deep ultraviolet wavelength is solved.