Mask assembly, mask frame and mask supporting frame

A technology for a mask assembly and a support frame, which is applied in the field of display processing equipment, can solve the problems of increased production cost, small total frame thickness specification value, increased production cost, etc., and achieves the effect of reducing replacement rate and production cost.

Active Publication Date: 2018-05-15
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, after multiple flattening processes on the existing frame, the total thickness of the frame will be smaller than the specification value, the frame cannot be reused, and the entire frame needs to be replaced, and the production cost will increase
[0004] That is to say, the frame of the existing reticle needs to be completely replaced after repeated use due to size changes, the frame cannot be recycled for many times, and the replacement rate of the frame is high, which greatly increases the production cost

Method used

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  • Mask assembly, mask frame and mask supporting frame
  • Mask assembly, mask frame and mask supporting frame
  • Mask assembly, mask frame and mask supporting frame

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Embodiment Construction

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] The invention provides a mask assembly, the mask assembly includes a mask frame and a mask support frame; the mask frame includes at least one first connection portion; the mask support frame includes at least one second connection portion; the mask frame It is detachably connected with the mask support frame through the first connection part and the second connection part.

[0026] In order to clearly illustrate the specific structure of the mask frame...

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PUM

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Abstract

The invention discloses a mask assembly, a mask frame and a mask supporting frame. The mask assembly comprises the mask frame and the mask supporting frame; the mask frame comprises at least one firstconnecting part; the mask supporting frame comprises at least one second connecting part; and the mask frame is detachably connected with the mask supporting frame through the at least one first connecting part and the at least one second connecting part. The mask assembly comprises the mask frame and the mask supporting frame which are detachably connected, when the mask assembly is replaced, the size of the mask frame is not changed, so that the mask frame can be directly recycled simply by replacing the mask supporting frame. Repeated recycling of the mask frame can be realized, the replacement rate of the mask frame is lowered and the production cost is lowered.

Description

technical field [0001] The invention relates to the technical field of display processing equipment, in particular to a mask component, a mask frame and a mask support frame. Background technique [0002] Organic Light Emitting Diode (OLED) is a new type of display technology. Vacuum evaporation technology is used to prepare OLED thin films, organic / metallic materials are heated in a vacuum environment, the materials are sublimated by heat, and an organic / metallic thin film with a certain shape is formed on the surface of the substrate through a patterned mask. After continuous deposition and film formation of various materials, an OLED structure with multi-layer thin films can be formed. [0003] In actual use, because a certain amount of glass is continuously evaporated, the mask plate needs to be cleaned before it can be loaded into the evaporation machine again to perform the evaporation process again. When the production line undergoes product switching, a new mask ne...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 蒋谦陈永胜
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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