A light/force/electrical coupling test device and test method based on scanning electron microscope in-situ mechanical test system
A technology of scanning electron microscope and testing system, which is applied in the direction of measuring device, scanning probe technology, scanning probe microscopy, etc., can solve the problem of quantitative research on the coupling relationship between micro-nano semiconductor materials and other problems, to overcome the small test space of the sample, to achieve the effect of expansion and good sealing
Active Publication Date: 2020-03-24
XIANGTAN UNIV
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[0005] Aiming at the problem that there is no quantitative research on the coupling relationship between light / force / electricity of micro-nano semiconductor materials and the ability of commercial in-situ sample rods to test electricity, a light / force / electricity test system based on scanning electron microscope in-situ mechanical testing system is constructed. Coupling test fixtures are necessary
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[0050] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0051] see Figure 1-3 , an optical / force / electrical coupling test device based on a scanning electron microscope in-situ mechanical testing system, including a scanning electron microscope, an in-situ mechanical testing system, an optical fiber vacuum device 4, a laser 3 and a laser focusing lens 9, the in-situ mechanical testing system It includes a dual-function in-situ sample rod 2 and a system controller. The dual-function in-situ sample rod 2 is set in the sample chamber 6 of the scanning electron microscope and is electrically connected to the system controller; the laser focusing lens 9 is installed on the scanning electron microscope. In the sample chamber 6 of the electron microscope, the optical fiber vacuum device 4 is installed on the flange 5 and the inside is sealed with an optical fiber 8; the laser focusing lens 9 is arranged i...
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Abstract
The invention discloses an optical / mechanical / electrical coupling testing device based on a scanning electron microscope in-situ mechanical testing system, and a testing method thereof. The in-situ mechanical testing system includes a mechanical / electrical double-function in-situ sample rod and a system controller, wherein the mechanical / electrical double-function in-situ sample rod is arranged ina sample chamber of the scanning electron microscope, and is electrically connected with the system controller; the system controller is electrically connected with a computer; a laser is arranged atthe outside of the scanning electron microscope; and a laser focusing lens is arranged in the sample chamber of the scanning electron microscope and is connected with the laser through a fiber for introducing an optical signal into the mechanical / electrical double-function in-situ sample rod. The optical / mechanical / electrical coupling testing device based on a scanning electron microscope in-situmechanical testing system establishes correlation between micro-nano semi conducting material photoproduction carrier concentration and mechanical / electrical performance so as to realize expansion ofthe in-situ sample rod function of the scanning electron microscope, and can really reflect the optical / mechanical / electrical coupling performance of the micro-nano semi conducting material, on the basis of the piezoelectric optoelectronics theory.
Description
technical field [0001] The invention relates to the technical field of in-situ testing of properties of micro-nano functional materials, in particular to an optical / force / electrical coupling testing device based on a scanning electron microscope in-situ mechanical testing system and a testing method thereof. Background technique [0002] In recent years, nanomaterials have attracted extensive attention in the scientific field due to their special properties such as piezoelectricity, optoelectronics, and semiconductors. The researchers found that stress can be introduced based on the special properties of nanomaterials to further improve the performance of the device. (ACSNano.2010,4(7):4220-4224.) Wang Zhonglin's group grew n-type ZnO nanowires on p-type GaN substrates to construct light-emitting diodes, and regulated the luminescence performance of the diodes by introducing strain to the ZnO nanowires. (Nano Letters.2011,11(9):4012-4017.) Based on the piezoelectric effect ...
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IPC IPC(8): G01Q60/24
CPCG01Q60/24
Inventor 郑学军李升峰赵为彭金峰董辉
Owner XIANGTAN UNIV