Method for observing magnetic materials by cold field scanning electron microscope

A magnetic material and field scanning technology, which is applied in the direction of material analysis by measuring secondary emissions, material analysis by wave/particle radiation, and material analysis, to achieve strong repeatability, improve image quality, and simple operation

Pending Publication Date: 2018-06-15
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The key technical problem to be solved by the present invention is, after first solving the problem of ferromagnetic sample fixation using the innovative sample stage that I have obtained patents for 15 years, by improving the experimental conditions and parameters, the secondary electrons are received by the In-lense probe. chance, resulting in greatly improved picture quality and resolution

Method used

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  • Method for observing magnetic materials by cold field scanning electron microscope
  • Method for observing magnetic materials by cold field scanning electron microscope
  • Method for observing magnetic materials by cold field scanning electron microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0035] Embodiment 1: Adjust the accelerating voltage HT to 10kv, adjust the beam spot diameter to 10, and adjust the working distance to 10 for observation, and then adjust to clear pictures in the fast scan mode. The shooting adopts the slowest scanning speed in the Frame freeze mode. If the image has glitches, switch to the integrated mode to shoot, and the picture effect is the same figure 2 .

Embodiment approach 2

[0036] Embodiment 2: Adjust the accelerating voltage HT to 10kv, adjust the beam spot diameter to 11, and adjust the working distance to 11 for observation, and then adjust to clear pictures in the fast scan mode. The shooting adopts the slowest scanning speed in the Frame freeze mode. If the image has glitches, switch to the integrated mode to shoot, and the picture effect is the same figure 2 .

Embodiment approach 3

[0037] Implementation Mode 3: Adjust the accelerating voltage HT to 13kv, adjust the beam spot diameter to 11, and adjust the working distance to 11 for observation, and then adjust to clear pictures in the fast scan mode. The shooting adopts the slowest scanning speed in the Frame freeze mode. If the image has glitches, switch to the integrated mode to shoot, and the picture effect is the same figure 2 .

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Abstract

The invention provides a method for observing magnetic materials by a cold field scanning electron microscope. The method solves the technical problems that ferromagnetic materials cannot be observedby the cold field electron microscope. The problems of fixing and observing of the ferromagnetic materials can be realized by equipment self-design and modification and experimental method modifying.On one hand, by self-design of a sample table, the problem of sample fixing can be solved, on the other hand, by innovation of observation conditions and parameters of the electron microscope and a shooting method, the observation effect of the ferromagnetic materials can be solved. The advantages of the method are that the new sample table can avoid damage to an electron microscope objective lensby magnetic samples, the experimental efficiency can be greatly improved, and the sample preparation process is simplified. In addition, the limitation of the cold field scanning electron microscopefor the ferromagnetic materials can also be broken, undifferentiated observation can be achieved, and the use scope of the cold field electron microscope can be expanded.

Description

technical field [0001] The invention relates to a method for observing magnetic materials with a cold-field electron microscope, which is a method for breaking the limitation of the cold-field scanning electron microscope on ferromagnetic materials and realizing indiscriminate observation of ferromagnetic materials and common materials. Background technique [0002] Field emission scanning electron microscope, as the third generation in the history of electron microscope development (divided by filament material: first-generation tungsten filament, second-generation lanthanum hexaboride / cerium hexaboride, third-generation field emission), with nano Materials research upsurge developed. Compared with the ordinary scanning electron microscope, its advantage is that it adopts a high-brightness field emission electron gun. The principle is that the high electric field causes the potential barrier of the electron to produce the Schottky effect, and obtains an extremely thin elect...

Claims

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Application Information

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IPC IPC(8): G01N23/22
CPCG01N23/22G01N23/2202G01N23/2204
Inventor 程锦张立峰焦树强候新梅王福明宋波罗海文王玲
Owner UNIV OF SCI & TECH BEIJING
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