Silicon dioxide waveguide and lithium niobate film vertically-coupled resonant integrated optical gyroscope

Abstract

The invention discloses a silicon dioxide waveguide and lithium niobate film vertically-coupled resonant integrated optical gyroscope. The resonant integrated optical gyroscope comprises a base wafer,a lower coating layer, a silicon dioxide waveguide ring, a silicon dioxide straight waveguide, an upper coating layer, a lithium niobate film, an electric-optic frequency shifter optical waveguide, an electric-optic frequency shifter metal electrode and a lithium niobate straight strip optical waveguide. A light wave passing through electric-optic frequency shifting inside a lithium niobate filmoptical waveguide can be guided into the silicon dioxide waveguide ring along the vertical direction for angular speed measurement; the characteristics, such as low transmission loss and low bending loss, of the silicon dioxide waveguide ring are combined with the electric-optic frequency shifting function of lithium niobate crystal; the problem that an integrated optical frequency shifter is difficult for the integrated optical gyroscope based on the silicon dioxide waveguide to manufacture is overcome, and the problem that the waveguide ring inside the integrated optical gyroscope based on the silicon dioxide waveguide is great in bending loss and excessive in ring semi-diameter is also solved, so that the integration level and practical value of the resonant integrated optical gyroscopeare improved, and the resonant integrated optical gyroscope is applicable for realizing batch production.

Description

technical field [0001] The invention relates to the technical fields of navigation and inertial navigation such as optical gyroscopes, in particular to a resonant integrated optical gyroscope in which silicon dioxide waveguides and lithium niobate thin films are vertically coupled. Background technique [0002] The optical gyroscope is a new type of inertial instrument that uses the Sagnac effect to measure the angular rate of rotation. There are three main categories of optical gyroscopes: laser gyroscopes, fiber optic gyroscopes and integrated optical gyroscopes. At present, laser gyro technology has been very mature, and has been applied in many inertial navigation fields, especially in high-precision fields. However, the laser gyro needs to use the vibration of the cantilever beam structure to avoid its "lock-up" phenomenon, so the laser gyro is not an all-solid-state instrument. Compared with the laser gyro, the fiber optic gyro has the advantages of smaller size, lig...

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Problems solved by technology

[0007] The purpose of the present invention is to provide a resonant integrated optical gyroscope in which silicon dioxide waveguide and lithium niobate thin film are vertically coupled, so as to solve the above-mentioned difficult problem of making integrated optical frequency shifter made of silicon dioxide material and the bending loss of lithium niobate optical waveguide oversized problem

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