TFT substrate and manufacturing method thereof

A manufacturing method and substrate technology, which are used in semiconductor/solid-state device manufacturing, optics, instruments, etc., can solve the problems of peeling off the protective layer, difficult to control parameters, poor display of liquid crystal panels, etc., and achieve a small tilt angle and reduce undercutting phenomenon. , show good effect
CN108257976AActive Publication Date: 2018-07-06WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD

Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
Publication Date
2018-07-06

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Abstract

The invention provides a TFT substrate and a manufacturing method thereof. The TFT substrate comprises a base substrate, a metal layer arranged on the base substrate, an insulating layer arranged on the base substrate and the metal layer, a bottom common electrode arranged on the insulating layer, and a protective layer arranged on the insulating layer and the bottom common electrode. The insulating layer has first via holes exposing the metal layer. The bottom common electrode has second via holes formed in areas corresponding to the first via holes. The thickness of the edge of the bottom common electrode near the second via holes gradually decreases along the direction near the second via holes, so that the upwarp angle of the edge of the bottom common electrode near the second via holes is reduced, and the probability of bottom cutting is reduced. Therefore, the risk of peeling of the film formed on the bottom common electrode is reduced, the yield of the TFT substrate is improved,and the display effect of the LCD panel is good.
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Description

technical field

[0001] The invention relates to the field of display technology, in particular to a TFT substrate and a manufacturing method thereof. Background technique

[0002] With the development of display technology, liquid crystal displays (Liquid Crystal Display, LCD) and other flat display devices are widely used in mobile phones, televisions, personal Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become the mainstream of display devices.

[0003] Most of the liquid crystal displays currently on the market are backlight liquid crystal displays, which include a liquid crystal display panel and a backlight module. The working principle of the liquid crystal display panel is to pour liquid crystal molecules between the thin film transistor array substrate (ThinFilm Transistor Array Substrate, TFT Array Substrate) and the color filter substrate (ColorFilter Substrate, CF Substrate), and...

Claims

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