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Coating method of non-newtonian fluid material and coating system thereof

A technology of non-Newtonian fluid and coating method, which is applied in the field of coating method and coating system of non-Newtonian fluid, which can solve the problems of film breaking property, low margin and poor coating manufacturing process, etc.

Active Publication Date: 2018-07-10
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the coating process of non-Newtonian fluids has the problems of low coating process margin, easy film breakage and poor film-forming properties.

Method used

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  • Coating method of non-newtonian fluid material and coating system thereof
  • Coating method of non-newtonian fluid material and coating system thereof
  • Coating method of non-newtonian fluid material and coating system thereof

Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0053] Figure 5 is a curve diagram of shear stress rate versus shear viscosity according to Experimental Example 1 of the present invention.

[0054] Please refer to Figure 5 , in this experimental example, the non-Newtonian fluid material is high-temperature polyimide (polyimide; PI), which is a high-viscosity material. In this experimental example, the shear viscosity corresponding to different shear rates of high-temperature polyimide at room temperature (such as 23°C±10°C) can be obtained by using a viscometer (such as a Brookfield DV II+ viscometer). Depend on Figure 5 shown. Then, according to Figure 5 The zero-shear viscosity and power factor of high-temperature polyimide at room temperature were obtained by regression method, which were 5564.3cp and -0.964, respectively. In step S100 , the above-mentioned zero-shear viscosity and power factor can be substituted into the formula (1), and the relational formula between the shear viscosity and the shear stress ra...

experiment example 2

[0074] Figure 7 is a curve diagram of shear stress rate versus shear viscosity according to Experimental Example 2 of the present invention.

[0075] Please refer to Figure 7 , Experimental Example 2 has only the following differences from Experimental Example 1, and the rest of the steps are the same as Experimental Example 1. Experimental Example 2 is coated with a thick film photoresist material, such as an acrylic photoresist paint. The above thick film photoresist material is a medium viscosity material. The thick-film photoresist has a zero-shear viscosity of 1059.1 cp, a power factor of -0.922 and a surface tension of 37 dyne / cm at room temperature (for example, 23° C.±10° C.). In this embodiment, the above-mentioned zero-shear viscosity and power factor can be measured by a viscometer (brookfield DV II+ viscometer), and the above-mentioned surface tension can be measured by a surface tension tester (KRUSS). In addition, with constant acceleration of 10mm / s 2 , t...

experiment example 3

[0091] Figure 9 is a curve diagram of the shear stress rate versus the shear viscosity according to Experimental Example 3 of the present invention.

[0092] Please refer to Figure 9 , Experimental Example 3 has only the following differences from Experimental Example 1, and the rest of the steps are the same as Experimental Example 1. Experimental Example 3 was coated with a polarized liquid crystal material (manufactured by OPTIVA), which is a relatively low viscosity material. The polarized liquid crystal material has a zero-shear viscosity of 111.65 cp, a power factor of -0.865 and a surface tension of 32 dyne / cm at room temperature (for example, 23° C.±10° C.). In this embodiment, the above-mentioned zero-shear viscosity and power factor can be measured by a viscometer (brookfield DV II+ viscometer), and the above-mentioned surface tension can be measured by a surface tension tester (KRUSS). In addition, with constant acceleration of 100mm / s 2 , to increase the coat...

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Abstract

The invention discloses a coating method of a non-Newtonian fluid material and a coating system thereof. The coating method of the non-Newtonian fluid material includes the following steps. An equation of shear rate and shear viscosity of the non-Newtonian fluid material represented by equation (1) is obtained, wherein eta is shear viscosity, eta0 is zero shear viscosity, {dot over (y)} is shear rate, and n is power-law index. An initial gap between a coating apparatus and a substrate and a thickness of a film of the non-Newtonian fluid material to be formed are set. The non-Newtonian fluid material is coated on the substrate in a non-constant coating velocity manner using the coating apparatus. The shear viscosity of the non-Newtonian fluid material is obtained from equation (1) accordingto the coating velocity and thickness of the non-Newtonian fluid material. The gap between the coating apparatus and the substrate is adjusted according to the shear viscosity, coating velocity, andthickness. Through adjusting the gap between the coating apparatus and the substrate, film thickness uniformity can be improved and a problem of film damage does not easily occur, and furthermore margin of a coating manufacture process can be improved.

Description

technical field [0001] The invention relates to a coating method and a coating system thereof, and relates to a non-Newtonian fluid coating method and a coating system thereof. Background technique [0002] It is a high-efficiency and fast technology to produce functional film products by wet coating process. Compared with dry manufacturing processes such as PVD (Physical Vapor Deposition; PVD) and CVD (Chemical Vapor Deposition; CVD), the wet coating process has great competitiveness in cost and yield, and can be applied to the photolithography process of photolithography. In the manufacturing process of color filter, alignment film of liquid crystal display and organic low dielectric layer of integrated circuit, etc. caused by resist, dye and pigment dispersion method. [0003] In the past, coating materials were mostly low-viscosity. In recent years, due to the rise of flexible substrates, coating materials have also changed into high-viscosity fluids, that is, non-Newto...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C5/02B05C11/10
CPCB05C5/02B05C11/1002H01L21/6715B05C5/0254B05C11/1018B05C11/1023B05D1/26B05D7/24C09D7/65H01L21/67017B01J2219/00164B41J2/01H01L21/677C08K9/04B01F23/4105
Inventor 陈育翔张德宜
Owner IND TECH RES INST
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