A surface anti-reflection film manufacturing process for a plate containing polymethyl methacrylate
A technology of polymethyl methacrylate and process technology, which is applied in the direction of metal material coating technology, instruments, optical components, etc., can solve the problems of cracking, poor adhesion, and poor surface hardness of the evaporated layer, and achieve the reduction of the vaporized layer. cracking effect
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[0029] This embodiment provides a treatment process for the surface of a plate containing polymethyl methacrylate, specifically, adding a layer of polymethyl methacrylate with a thickness of 20-30nm between the polymethyl methacrylate substrate and the evaporated anti-reflection film layer. silicon monoxide.
[0030] The design structure of this embodiment is as follows, PMMA / M / H1 / L1 / H2 / L2 / H3 / L3 / Air.
[0031] Among them, M represents silicon monoxide, and its refractive index is N=1.55
[0032] H1, H2, and H3 all represent vapor-deposited layers of ceramic materials with a high refractive index, and their refractive index is N=2.3-2.35;
[0033] L1, L2, and L3 all represent vapor-deposited layers of ceramic materials with a low refractive index, and their refractive index is N=1.45-1.46;
[0034] In the process of evaporating silicon monoxide M: no oxygen is introduced and no ion source is used to assist, and the rate of silicon monoxide deposition is set at 3-3.5A / S.
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