High-efficiency low-cost micro-cavity coupling system and preparing method thereof

A coupling system, low-cost technology, applied in the field of microcavity coupling system, can solve problems such as low efficiency, and achieve the effect of reducing cost and high coupling efficiency

Inactive Publication Date: 2018-08-17
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Claims
  • Application Information

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Problems solved by technology

Concentrating light coupling using free space is relatively inefficient compared to evanescent wave coupling meth

Method used

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  • High-efficiency low-cost micro-cavity coupling system and preparing method thereof
  • High-efficiency low-cost micro-cavity coupling system and preparing method thereof
  • High-efficiency low-cost micro-cavity coupling system and preparing method thereof

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with the description of the drawings and specific embodiments.

[0021] Such as figure 1 As shown, a high-efficiency, low-cost microcavity coupling system mainly consists of two parts: waveguide 2 and microcavity 1. Different from the traditional evanescent wave coupling method, in this system, the waveguide 2 is directly connected to the microcavity 1, and after the optical signal is input into the connection waveguide 2, it directly enters the microcavity 1 to excite a resonant mode, so there is no need to consider the waveguide Phase-matched with microcavity 1. In actual preparation, since the size of waveguide 2 and microcavity 1 is often above 500nm, and the distance between waveguide 2 and microcavity 1 does not need to be considered, this structure can be prepared by traditional photolithography method, which greatly reduces the preparation cost and is convenient. Large-scale batch production ...

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Abstract

The invention provides a high-efficiency low-cost micro-cavity coupling system which comprises a waveguide and a micro-cavity. The waveguide is directly connected with the micro-cavity. An optical signal directly enters the micro-cavity through the waveguide and excites a resonance mode. The invention further provides a preparing method of the high-efficiency low-cost micro-cavity coupling system.The high-efficiency low-cost micro-cavity coupling system is advantageous in that the waveguide is directly connected with the micro-cavity; no high preparing precision requirement is obtained; the high-efficiency low-cost micro-cavity coupling system can be realized through lithography; cost is effectively reduced and furthermore relatively high coupling efficiency is realized; Furthermore the high-efficiency low-cost micro-cavity coupling system is suitable for a plurality of semiconductor materials.

Description

technical field [0001] The invention relates to a microcavity coupling system, in particular to a high-efficiency, low-cost microcavity coupling system and a preparation method thereof. Background technique [0002] Optical microcavities working in Whispering Gallery Mode (WGM) have received extensive attention in recent years due to their high quality factor, small mode volume, and relatively simple preparation. Devices developed based on optical microcavities have played an irreplaceable role in basic scientific research and optoelectronic technology research and development. However, it is still a major difficulty to achieve sufficient and effective information exchange between on-chip devices and optical systems, and the common coupling methods still have their own drawbacks. [0003] At present, the main forms of optical microcavities studied at home and abroad include microspheres, microcore rings, microdisks and microrings. The volume of the microsphere resonator is...

Claims

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Application Information

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IPC IPC(8): G02B6/26
Inventor 宋清海刘帅张靖肖淑敏
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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