Miniaturized magnetocapacitive sensors based on magnetic concentrators and magnetic nanoparticle composites
A technology of magnetic nanoparticles and composite materials, applied in the field of miniature magnetic sensors, can solve the problem that magnetic sensors are not suitable for magnetic vector measurement, and achieve the effect of no hysteresis measurement range, high sensitivity, and improved sensitivity
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[0029] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0030] A miniaturized magnetocapacitive sensing device based on a magnetic concentrator and magnetic nanoparticle composite, such as figure 1 , 2 As shown, it includes an SOI substrate 1 , two magnetic field concentrators 2 , a magnetocapacitive sensing unit 3 of magnetic nanoparticle composite material, a left metal electrode plate 4 and a right metal electrode plate 5 .
[0031] Among them, the SOI substrate 1 includes the top layer of low-resistance Si 11, the middle buried layer of SiO 2 12 and underlying Si 13.
[0032] The two magnetic field concentrators and the magnetocapacitance sensing unit of the magnetic nanoparticle composite are located on the SiO after the top layer of the SOI substrate is patterned and etched with low-resistance Si 11 2 12 surfaces; two magnetic field concentrators 2 are symmetrically arranged; magnetic nano...
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