Scanning micromirror integrating differential angle sensor

Abstract

The invention discloses an electromagnetic drive type scanning micromirror integrating a differential angle sensor, and the scanning micromirror includes a chip integrating an electromagnetic driver and an angle sensor and a silicon-based MEMS reflecting mirror surface that clings to the chip at an upper side. The chip is composed of a central mirror plate, a torsion beam and a support framework.In order to overcome the defects of small mirror surface size and poor reliability of a low-frequency device of a traditional silicon-based MEMS scanning micromirror, the scanning micromirror providedby the invention adopts flexible FR4 or aluminum as a substrate material; in order to improve the output signal quality of the electromagnetic angle sensor, the scanning micromirror integrates the differential angle sensor, effectively reduces a nonlinear error and common-mode noise, and improves an anti-interference capability; and in order to increase the drive capability of the electromagneticdriver and the sensitivity of the angle sensor, both a drive coil and a sensor coil adopt a wiring mode of double-layer wiring. The electromagnetic drive type scanning micromirror integrating a differential angle sensor has the advantages of simple and novel structure, easy manufacture, low cost and capability of batch production, and is widely applied to the fields of miniature spectrographs, optical scanning systems, biomedical imaging and the like.

Description

technical field [0001] The invention relates to the fields of micromechanics and optical scanning, in particular to a scanning micromirror. Background technique [0002] As a miniature optical scanning component, scanning micromirror is widely used in many fields such as barcode reading, laser radar, projection display, biomedical imaging and micro spectrometer. At present, silicon micromirrors based on MEMS technology occupy the mainstream of the market due to their low cost, low power consumption, small size, and mass production. However, due to the hard and brittle inherent properties of silicon materials and the limitations of MEMS technology, silicon-based MEMS scanning micromirrors have two defects: small mirror size and poor reliability of low-frequency devices, which greatly limits their application in the field of low-frequency and large mirror requirements. It is difficult to meet the urgent needs of many optical microsystems such as micro-spectrometers, fluoresce...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to address the deficiencies in the prior art, to provide a scanning micromirror with an integrated differential angle sensor, which not only overcomes the defects of the small size of the traditional silicon-based MEMS scanning micromirror and the poor reliability of low-frequency devices, but also improves the angle sensor. Signal quality for improved drive and sensing performance

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