Micro-piezoresistive sensor vibration and temperature interference compensation model and system

Abstract

The invention discloses a micro-piezoresistive sensor vibration and temperature interference compensation model and system, and the method comprises the following steps: 1, calculating a temperature load voltage compensation model VT; 2, obtaining a pressure P caused by a vibration load to a micro-piezoresistive sensor, and obtaining a VP vibration load voltage compensation model according to P; 3, obtaining a real voltage value compensation model according to VT and VP, and achieving the compensation for the micro-piezoresistive sensor. Compared with a conventional experiment method, a mode of combining theoretical derivation and a finite element analytical model is easy to operate, is economical and is high in accuracy. The method can provide reference for the anti-interference design ofa sensor structure, and also can provide a basis for the error interference compensation of the sensor. The compensation model and system can achieve the online correction of the errors caused by temperature and vibration loads to a measurement result, and are very high in practicality.

Description

technical field [0001] The invention relates to a micro piezoresistive sensor compensation model and system, in particular to a micro piezoresistive sensor vibration and temperature interference compensation model and system. Background technique [0002] In recent years, the running speed of high-speed trains has been increasing, and the effect of aerodynamic noise has been increasing, which affects the comfort of passengers and surrounding residents. Studies have shown that under high-speed trains, pulsating pressure is the root cause of train noise. Therefore, noise reduction of high-speed trains requires First explore the mechanism and characteristics of pulsating pressure; however, the surface pulsating pressure of high-speed trains has many characteristics such as small amplitude, wide frequency range, and susceptibility to interference, and various interference signals are mixed in the pulsating pressure components; and because the pulsating pressure amplitude is low ...

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Problems solved by technology

[0002] In recent years, the running speed of high-speed trains has been increasing, and the effect of aerodynamic noise has been increasing, which affects the comfort of passengers and surrounding residents. Studies have shown that under high-speed trains, pulsating pressure is the root cause of train noise. Therefore, noise reduction of high-speed trains requires First explore the mechanism and characteristics of pulsating pressure; however, the surface pulsating pressure of high-speed trains has many characteristics such as small amplitude, wide frequency range, and susceptibility to interference, and various interference signals are mixed in the pulsating pressure components; and because the pulsating pressure amplitude is low , generally only tens to hundreds of Pa, resulting in a low signal-to-noise ratio, so the extraction and analysis of pulsating pressure signals are very difficult

[0003] At present, patch-shaped micro piezoresistive pressure sensors are commonly used in high-speed train surface pressure test circuit experiments. Micro piezoresistive sensors not only have high sensitivity and good mechanical properties, but also can be integrated into a small volume, which can minimize the size of the sensor. The impact of the external flow field; however, the micro piezoresistive sensor is easily disturbed by vibration, temperature and other factors during the test process, causing errors to the test signal; at present, the error mechanism analysis and compensation model of the micro piezoresistive pressure sensor are an important Research topic; due to the temperature effect of single crystal silicon, its piezoresistive coefficient will change with temperature. At present, the main research field of sensor error interference is temperature; In terms of temperature interference and mechanism compensation, at present, the temperature interference output of the sensor is mainly studied through the temperature effect test. By placing the sensor to be tested in a closed test box, by adjusting the temperature and air pressure changes in the box, observe the sensor in different conditions. Sensitivity output under temperature and air pressure levels; however, based on a large number of test data to establish multiple regression analysis or neural network models, there are certain deficiencies in the method of eliminating temperature interference; Internally, due to the dynamic changes between temperature and pressure and the mutual coupling effects between the two, it is difficult for the temperature and pressure measurement points to reach the desired value at the same time, requiring multiple iterative control; secondly, the establishment of models such as neural networks requires a large amount of experimental data. Different sensors need to conduct temperature tests again, which is too costly; moreover, temperature tests are basically aimed at finished sensors, and it is difficult to understand the temperature performance of sensors through tests at the design stage, so as to make corresponding improvements

[0004] At present, in terms of vibration interference mechanism and compensation, due to the small vibration interference of general sensors, there are few related studies in this area; but for low-amplitude pulsating pressure tests, ultra-micro-pressure, high-sensitivity piezoresistive sensors are generally required. The vibration interference also increases accordingly, and the value relative to the pulsating pressure cannot be directly ignored

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