Hall device applied to three-dimensional Hall sensor and offset cancellation method
A Hall sensor, Hall device technology, applied in the size/direction of the magnetic field, instruments, three-component magnetometers, etc., can solve the problems of high packaging requirements and high cost, achieve improved performance, offset voltage elimination, application assistance Effect
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[0029] The technical solution of the present invention will be specifically described below in conjunction with the accompanying drawings.
[0030] The invention provides a Hall device applied to a three-dimensional Hall sensor, which can be integrated on a chip to realize a monolithic integrated three-dimensional Hall sensor, and the Hall device includes a horizontal Hall device and a vertical Hall device .
[0031] The horizontal Hall device includes a P-type substrate layer, an N well layer, and a P+ injection region layer arranged sequentially from bottom to top, and the P+ injection region layer does not completely cover the N well layer to expose the four corners of the N well layer. The N+ injection region layer at the four corners of the N well layer and the metal layer covering the P+ injection region layer and the N+ injection region layer, the N well layer is used as the active region of the horizontal Hall device, and the N+ injection region layer is used as the ho...
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